公开(公告)号：IL317634A

公开(公告)日：2025-02-01

申请号：IL31763424

申请日：2024-12-11

Applicant: ASML NETHERLANDS BV ,  EL GAWHARY OMAR ,  HELFENSTEIN PATRICK PHILIPP ,  VAN RIJSWIJK LOES FREDERIQUE ,  GEYPEN NIELS ,  JONQUIERE HUGO LAURENT ,  INVERNIZZI ANDREA ,  CRAMER HUGO AUGUSTINUS JOSEPH

Inventor： EL GAWHARY OMAR ,  HELFENSTEIN PATRICK PHILIPP ,  VAN RIJSWIJK LOES FREDERIQUE ,  GEYPEN NIELS ,  JONQUIERE HUGO LAURENT ,  INVERNIZZI ANDREA ,  CRAMER HUGO AUGUSTINUS JOSEPH

Abstract: Disclosed is a method of determining at least one parameter of interest relating to a structure formed in at least one respective layer on a substrate, the method comprising: obtaining a measured metrology data relating to a measurement of the structure; obtaining a model, the model describing the structure in terms of a plurality of model parameters, the model parameters comprising estimated values; and performing in sequence a plurality of optimization steps, based on the measured metrology data, to determine the plurality of model parameters, each of the plurality of optimization steps determining a subset of the plurality of model parameters.

公开(公告)号：IL317119A

公开(公告)日：2025-01-01

申请号：IL31711924

申请日：2024-11-20

Applicant: ASML NETHERLANDS BV ,  SCHOLZ SANDY CLAUDIA ,  COENEN TEIS JOHAN ,  PORTER CHRISTINA LYNN ,  VAN RIJSWIJK LOES FREDERIQUE ,  MIDDLEBROOKS SCOTT ANDERSON ,  HELFENSTEIN PATRICK PHILIPP

Inventor： SCHOLZ SANDY CLAUDIA ,  COENEN TEIS JOHAN ,  PORTER CHRISTINA LYNN ,  VAN RIJSWIJK LOES FREDERIQUE ,  MIDDLEBROOKS SCOTT ANDERSON ,  HELFENSTEIN PATRICK PHILIPP

Abstract: Disclosed is a method comprising: obtaining measured data relating to at least one measurement by a measurement apparatus configured to irradiate radiation onto each of one or more structures on a substrate; decomposing the measured data using a decomposition method to obtain multiple measured data components; obtaining simulated data relating to at least one simulation based on the one or more structures; decomposing the simulated data using the decomposition method to obtain multiple simulated data components; matching between at least a portion of the simulated data components and at least a portion of the measured data components; and extracting a feature of the substrate based on the matching of at least a portion of the simulated data components and at least a portion of the measured data components.