公开(公告)号：WO2005090788A1

公开(公告)日：2005-09-29

申请号：PCT/US2005/008363

申请日：2005-03-11

Applicant: HELIX TECHNOLOGY CORPORATION ,  BARLETT, Allen, J. ,  ASH, Gary, S. ,  THOMPSON, Brian ,  STIRA, Mark, A.

Inventor： BARLETT, Allen, J. ,  ASH, Gary, S. ,  THOMPSON, Brian ,  STIRA, Mark, A.

IPC: F04B37/08

CPC classification number: F04B37/08

Abstract: A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A rough valve port can connect the outer duct of the assembly to a rough vacuum pump; and a relief valve port can connect the outer duct of the assembly to an exhaust stack.

Abstract translation: 单个管道阀组件提供集成的低温泵，其具有将组件连接到具有内部管道和外部管道的同轴连接的低温泵的净化阀口。 加压气体接口通过内部管道将加压气体源连接到低温泵。 一个粗糙的阀口可以将组件的外部管道连接到一个粗糙的真空泵上; 并且安全阀端口可以将组件的外部管道连接到排气叠层。

公开(公告)号：WO1992020918A2

公开(公告)日：1992-11-26

申请号：PCT/US1992003972

申请日：1992-05-13

Applicant: HELIX TECHNOLOGY CORPORATION

Inventor： HELIX TECHNOLOGY CORPORATION ,  BARTLETT, Allen, J. ,  AITKEN, Douglas, F.

IPC: F04B0

CPC classification number: F04B37/08 ,  Y10S417/901

Abstract: A cryopump (6) is capable of pumping a process chamber at a process pressure and differentially pumping a second chamber such as an RGA (7) independently at a substantially lower pressure. A member (38) extends through the cryopump housing into a low pressure region disposed within the second stage array (30). The member (38) comprises a port for accessing the low pressure region, thus providing an independent differential pumping source. No physical seal is required between the member (38) and the main cryopump (6) volume to maintain the pressure differential.

公开(公告)号：WO1989003480A2

公开(公告)日：1989-04-20

申请号：PCT/US1988003502

申请日：1988-10-06

Applicant: HELIX TECHNOLOGY CORPORATION

Inventor： HELIX TECHNOLOGY CORPORATION ,  HIGHAM, Graham, J. ,  PRUITT, Gerald, R. ,  MORRIS, Ronald, N. ,  HEGER, Frank ,  LIVINGSTONE, James ,  TORMEY, David, P.

IPC: F04B35/04

CPC classification number: F16F7/116 ,  F04B35/045 ,  F25B9/14 ,  F25B2309/001 ,  F25B2500/13 ,  H02K33/06

Abstract: A linear motor compressor within a cryogenic refrigerator wherein the compressor space, within which a gaseous fluid is alternately compressed and expanded, is formed by a stationary piston (11) and a reciprocating armature (10) that is concentric about the piston. The armature is supported along a clearance seal with the stationary piston. An axial bore (14) along the stationary piston conveys gaseous fluid from the compression space (24) to a displacer within the cold finger of the cryogenic refrigerator. An isolator for reducing transmission into and out of the compressor comprising a dynamic absorber (40) and flat springs (61, 71) mounted with a damping material (95, 96) between the compressor and a mounting frame. A sensor (80) for detecting the position of the armature utilizes a target magnet (81) whose magnetic flux lines are decoupled from the flux lines generated about the coil.

Abstract translation: 低温冷冻机内的线性电动机压缩机，其中气体流体被交替地压缩和膨胀的压缩机空间由静止活塞（11）和与活塞同心的往复式电枢（10）形成。 电枢沿着与静止活塞的间隙密封件支撑。 沿着静止活塞的轴向孔（14）将气态流体从压缩空间（24）传送到低温冰箱的冷指状物内的置换器。 一种用于减少进入和离开压缩机的传动装置的隔离器，包括一个在压缩机和安装架之间安装有阻尼材料（95,96）的动态吸收器（40）和平板弹簧（61,71）。 用于检测电枢位置的传感器（80）利用目标磁体（81），其磁通线与绕线圈产生的磁通线分离。

公开(公告)号：WO1984002388A1

公开(公告)日：1984-06-21

申请号：PCT/US1983001893

申请日：1983-12-05

Applicant: HELIX TECHNOLOGY CORPORATION

Inventor： HELIX TECHNOLOGY CORPORATION ,  YOUNG, Niels, O. ,  HENDERSON, Robert ,  KERNEY, Peter, J.

IPC: F25B09/00

CPC classification number: F25B9/14 ,  F01B11/02 ,  F02G1/0435 ,  F02G1/0445 ,  F02G1/0535 ,  F02G2250/18 ,  F25B2309/001 ,  F25B2309/003

Abstract: A split Stirling refrigerator includes a pneumatically driven displacer (54), the displacer is driven substantially through an entire stroke by the pressure differential across a piston element (92) extending from the displacer. A small linear trimming motor is provided to assure proper phasing of the displacer movement with the refrigerator pressure wave, to prevent overstroke, and to assure complete stroke of the displacer (54).

Abstract translation: 分体斯特林冰箱包括气动驱动的置换器（54），所述置换器通过跨越从所述置换器延伸的活塞元件（92）的压力差大致整个行程驱动。 提供小的线性修整马达以确保置换器与冰箱压力波的运动的适当定相，以防止过冲，并确保置换器（54）的完全行程。

公开(公告)号：WO2006020196A1

公开(公告)日：2006-02-23

申请号：PCT/US2005/025394

申请日：2005-07-19

Applicant: HELIX TECHNOLOGY CORPORATION ,  BORENSTEIN, Michael, D. ,  ARNOLD, Paul, C.

Inventor： BORENSTEIN, Michael, D. ,  ARNOLD, Paul, C.

IPC: G01L21/12

CPC classification number: G01L21/12

Abstract: In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is placed in series with at least the compensating element. The current source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.

Abstract translation: 在电阻加热的热损失压力表中，在不同的占空比下，在感测元件和补偿元件之间切换电流。 结果，感测元件相对于补偿元件被加热。 固定电阻与至少补偿元件串联放置。 电流源施加电流以将感测元件加热到感测元件的电阻与补偿元件和固定电阻元件的组合电阻相匹配的温度。

公开(公告)号：WO1993025815A1

公开(公告)日：1993-12-23

申请号：PCT/US1993005397

申请日：1993-06-08

Applicant: HELIX TECHNOLOGY CORPORATION

Inventor： HELIX TECHNOLOGY CORPORATION ,  BARTLETT, Allen, J. ,  STOCHL, Charles, A. ,  GUERRA, Anthony, M. ,  DOPSON, Dale, A. ,  MEROSKI, Paul ,  STEVENS, Thomas, F.

IPC: F04B37/08

CPC classification number: F04B37/08 ,  Y10S417/901

Abstract: In a cryopump (10) a frost concentrating device (26) is affixed to a condensing cryopanel (34) and provides surfaces (32) for condensing gases which are cryopumped through an opening (152) in the vacuum vessel. The surfaces (32) of the frost concentrator (26) extend towards the opening (152) in the vacuum vessel and thus limit the amount of gases which condense on the surfaces (22) of the condensing cryopanel facing the opening. The result is that the gap between the radiation shield (18) and the condensing cryopanel (34) does not become significantly narrowed by condensing gases, particularly in the area closest to the opening through which gases are cryopumped. This allows other gases to pass easily through the gap and condense on surfaces (22) of the condensing cryopanel (34) further away from the opening (152) of the cryopump (10) or to be adsorbed by an adsorbent material shielded by the condensing cryopanel (34).

公开(公告)号：WO1989006333A1

公开(公告)日：1989-07-13

申请号：PCT/US1989000028

申请日：1989-01-04

Applicant: HELIX TECHNOLOGY CORPORATION

Inventor： HELIX TECHNOLOGY CORPORATION ,  BARTLETT, Allen, J.

IPC: F17C13/00

CPC classification number: H01F6/04 ,  F25B2400/17

Abstract: A recondenser with a primary heat exchanging surface for recondensing boil-off within a cryostat provides a second heat exchanging surface for removing heat leak into the cryostat. The second surface is cooled by the same working fluid that cools the primary surface, but at a temperature intermediate that of the primary surface and associated cooling apparatus which is remote from the cryostat. An intermediate transfer line transfers working fluid from an intermediate portion of the cooling apparatus to the second surface which is in heat exchange relation with a radiation shield of the cryostat but is out of physical contact with the radiation shield. The cooling apparatus includes a mechanical refrigerator which further cools working fluid returned form the second surface through the intermediate transfer line. The intermediate transfer line is preferably positioned in a non-contact helical manner about a final transfer line which carries the working fluid to the primary surface. The two transfer lines form an assembly which is less than about one inch in outer diameter and is removably positioned in the cryostat. The intermediate transfer line is thermally isolated from the final transfer line within the assembly.

公开(公告)号：WO1988001036A1

公开(公告)日：1988-02-11

申请号：PCT/US1987001920

申请日：1987-08-06

Applicant: HELIX TECHNOLOGY CORPORATION

Inventor： HELIX TECHNOLOGY CORPORATION ,  HIGHAM, Graham, J. ,  MORRIS, Ronald, N. ,  PRUITT, Gerald, R.

IPC: F25B09/00

CPC classification number: F16F7/116 ,  F16F15/08 ,  F16F2224/005 ,  F25B9/14 ,  F25B2309/001 ,  F25B2500/13

Abstract: A two mass vibration isolator (73) particularly suited to a linear reciprocating machine. Vibration into and out of the machine is attenuated by an isolator (73) placed between the machine and its mounting frame (74). The isolator is an elastomer (72) with a damping ratio of at least 0.1 sandwiched between two retainers (68, 70).

公开(公告)号：WO1987001768A1

公开(公告)日：1987-03-26

申请号：PCT/US1986001994

申请日：1986-09-23

Applicant: HELIX TECHNOLOGY CORPORATION

Inventor： HELIX TECHNOLOGY CORPORATION ,  TUGAL, Halil

IPC: F04B37/08

CPC classification number: F16F3/12 ,  F04B37/08

Abstract: A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows (12, 52) covered with vibration damping material (54) and separated by an intermediate mass (53). The damping material (54) fills the spaces between corrugations of the bellows (12) and is bonded to the bellows (12).

公开(公告)号：WO1983002994A1

公开(公告)日：1983-09-01

申请号：PCT/US1983000234

申请日：1983-02-23

Applicant: HELIX TECHNOLOGY CORPORATION

Inventor： HELIX TECHNOLOGY CORPORATION ,  CHELLIS, Fred, F. (deceased) ,  LESSARD, Philip, A.

IPC: F25B09/00

CPC classification number: F25B9/06 ,  F01L25/06 ,  Y10T137/6579

Abstract: Valves (26, 28) for controlling process gas at the cold end of an expansion engine (18) are fluid actuated. The actuating fluid is controlled by solenoid actual spool valves (36, 38) positioned at ambient temperature. The fluid is cooled in thermally regenerative flow paths (32, 34) extending between the solenoid actuated valve and the fluid actuated valve.

Abstract translation: 用于控制在膨胀发动机（18）的冷端处的处理气体的阀（26,28）是流体致动的。 致动流体由位于环境温度的电磁实际滑阀（36,38）控制。 在电磁致动阀和流体致动阀之间延伸的热再生流路（32,34）中冷却流体。