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公开(公告)号：WO1987001768A1
公开(公告)日：1987-03-26
申请号：PCT/US1986001994
申请日：1986-09-23
Applicant: HELIX TECHNOLOGY CORPORATION
Inventor： HELIX TECHNOLOGY CORPORATION , TUGAL, Halil
IPC: F04B37/08
Abstract: A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows (12, 52) covered with vibration damping material (54) and separated by an intermediate mass (53). The damping material (54) fills the spaces between corrugations of the bellows (12) and is bonded to the bellows (12).
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