公开(公告)号：DE3665378D1

公开(公告)日：1989-10-05

申请号：DE3665378

申请日：1986-04-21

Applicant: IMAGE GRAPHICS INC

Inventor： TARNOWSKI ANDREW A

IPC: G01D15/14 ,  G11B9/10 ,  H01J37/18 ,  H01J37/16

Abstract: A vacuum system is provided for an apparatus for accurately tracing on an electron sensitive film with an electron beam which passes through three adjacent vacuum stages and where each stage has a predetermined vacuum level is disclosed herein. The vacuum system is a high performance, fully automatic, three-stage, differentially pumped system. Two stages (14, 16, 18) of the system respectively use diffusion pumps (50, 60) as a first pump means. The diffusion pump (60) of the second stage is backed by a single direct drive mechanical pump (64) and also acts as the backing pump for the diffusion pump (50) of the first stage. The third stage (20) uses a single direct drive mechanical pump (68) for vacuum pumping its chamber.

公开(公告)号：CA1197898A

公开(公告)日：1985-12-10

申请号：CA429660

申请日：1983-06-03

Applicant: IMAGE GRAPHICS INC

Inventor： TARNOWSKI ANDREW A

IPC: G01D9/42 ,  G01D15/06 ,  G03G5/00

Abstract: IN THE UNITED STATES PATENT AND TRADEMARK OFFICE PATENT APPLICATION For: AN IMPROVED PARTICLE BEAM RECORDER SYSTEM HAVING A REFERENCING MEANS FOR ESTABLISHING REGISTRATION HOLES IN A FILM SUBSTRATE An improved particle beam recorder system is provided having a film gate which includes a referencing means for providing at least two differently shaped registration holes in a recording film substrate. The referencing means lock in, secure, and define the film position relative to a film receiving surface of a film gate during exposure imaging and thereby establish a defined relation between the image field and the film substrate and more particularly the registration holes thereof. The developed film image can thereafter be positioned in a predefined or desired relationship in a display means by aligning the registration holes of the film with suitable pegs of the display means. The registration holes also advantageously permit the images of exposed and developed films to be aligned relative to one another to permit accurate superimposition. The referencing means for producing the registration holes can be punch means which pierce the film. The punches are activated by a motor driven cam and controlled by an interlock circuit which disables the cam motor and the film advance motor during film exposure imaging. The referencing or punch means can be utilized in extended position during film exposure to secure the position of the film relative to the film gate.

公开(公告)号：CA1185648A

公开(公告)日：1985-04-16

申请号：CA405812

申请日：1982-06-23

Applicant: IMAGE GRAPHICS INC

Inventor： TARNOWSKI ANDREW A

IPC: G03F7/20 ,  G01D15/14 ,  G03C5/00 ,  G03F7/26 ,  G11B9/10 ,  G11B11/12 ,  G11B23/50 ,  H01J37/16 ,  H01J37/22 ,  H01J37/30 ,  H04N1/23 ,  H04N5/84

Abstract: PATENT APPLICATION For: AN IMPROVED SYSTEM AND FILM GATE FOR ACCURATELY IMAGING INFORMATION ON A FILM BY A CHARGED PARTICLE BEAM An improved particle beam recorder system having a pressure equalizing film gate including a platen for receiving a film thereon in pressure relieved relation to avoid trapping distortion causing air between the film and the platen. The platen can provide a curved film receiving surface and a predetermined tension can be applied to the recording film disposed on the platen to assure positive contact between the film and the platen A motor driven film advance system is provided to intermittently advance the film through the film gate to thereby intermittently provide fresh and stationary film for exposure and image recording. A particle beam generator is disposed in predetermined relation with the film and the film gate and the recording beam produced thereby is electronically positionally corrected for the known geometric distortions introduced by a predetermined continuous curvature of the film gate and the predetermined tensioning of the film to produce accurate imaging on the film.

公开(公告)号：CA1253196A

公开(公告)日：1989-04-25

申请号：CA506976

申请日：1986-04-17

Applicant: IMAGE GRAPHICS INC

Inventor： TARNOWSKI ANDREW A

IPC: G01D15/14 ,  G11B9/10 ,  H01J37/18 ,  H01J37/16

Abstract: PATENT APPLICATION OF: ANDREW A. TARNOWSKI FOR: IMPROVED VACUUM SYSTEM FOR A CHARGED PARTICLE BEAM RECORDING SYSTEM An improved vacuum system for a system for accurately tracing on an electron sensitive film with an electron beam which passes through three (3) adjacent vacuum stages and where each stage has a predetermined vacuum level is disclosed herein. The vacuum system is a high performance, fully automatic, three (3) stage, differentially pumped system. Two (2) stages of the system each use a diffusion pump as a first pump means. The diffusion pump of the second stage is backed by a single direct drive mechanical pump and also acts as the backing pump for the diffusion pump of the first stage. The third stage uses a single direct drive mechanical pump for vacuum pumping its chamber.

公开(公告)号：DE3280263D1

公开(公告)日：1990-11-29

申请号：DE3280263

申请日：1982-07-01

Applicant: IMAGE GRAPHICS INC

Inventor： TARNOWSKI ANDREW A

IPC: G03F7/20 ,  G01D15/14 ,  G03C5/00 ,  G03F7/26 ,  G11B9/10 ,  G11B11/12 ,  G11B23/50 ,  H01J37/16 ,  H01J37/22 ,  H01J37/30 ,  H04N1/23 ,  H04N5/84

Abstract: An improved particle beam recorder system having a pressure equalizing film gate including a platen for receiving a film thereon in pressure relieved relation to avoid trapping distortion causing air between the film and the platen. The platen can provide a curved film receiving surface and a predetermined tension can be applied to the recording film disposed on the platen to assure positive contact between the film and the platen. A motor driven film advance system is provided to intermittently advance the film through the film gate to thereby intermittently provide fresh and stationary film for exposure and image recording. A particle beam generator is disposed in predetermined relation with the film and the film gate and the recording beam produced thereby is electronically positionally corrected for the known geometric distortions introduced by a predetermined continuous curvature of the film gate and the predetermined tensioning of the film to produce accurate imaging on the film.

公开(公告)号：DE3473109D1

公开(公告)日：1988-09-01

申请号：DE3473109

申请日：1984-01-18

Applicant: IMAGE GRAPHICS INC

Inventor： TARNOWSKI ANDREW A ,  ANDERSON BRIAN G

IPC: H04N5/84 ,  H04N1/047 ,  H04N1/10 ,  H04N17/04

Abstract: A method and apparatus are described for improving the geometric fidelity of images reproduced in a charged particle beam device. The beam is deflected across a sensitive medium to form a test image of predetermined configuration. The test image is compared with a reference image and geometric deviations measured, at a number of points, are used to calculate correction signals required to modify the beam deflection to offset the deviations. Circuit adjustments are then made to provide the calculated correction signals. The correction signal adjustments are accomplished in separate non-interactive circuits for each of a plurality of predetermined corrections which only require a one time adjustment.

公开(公告)号：CA1208187A

公开(公告)日：1986-07-22

申请号：CA439167

申请日：1983-10-18

Applicant: IMAGE GRAPHICS INC

Inventor： TARNOWSKI ANDREW A ,  ANDERSON BRIAN G

IPC: H04N5/84 ,  H04N1/047 ,  H04N1/10 ,  H04N17/04 ,  G01D5/00

Abstract: PATENT APPLICATION OF: ANDREW A. TARNOWSKI and BRIAN G. ANDERSON FOR: IMPROVED METHOD AND APPARATUS FOR CORRECTING IMAGE DISTORTIONS A method and apparatus are described for improving the geometric fidelity of images reproduced in a charged particle beam device. The beam is deflected across a sensitive medium to form a test image of predetermined configuration. The test image is compared with a reference image and geometric deviations measured, at a number of points, are used to calculate correction signals required to modify the beam deflection to offset the deviations. Circuit adjustments are then made to provide the calculated correction signals. The correction signal adjustments are accomplished in separate non-interactive circuits for each of a plurality of predetermined corrections which only require a one time adjustment.

公开(公告)号：EP0199575B1

公开(公告)日：1989-08-30

申请号：EP86302983.1

申请日：1986-04-21

Applicant: Image Graphics, Inc.

Inventor： Tarnowski, Andrew A.

IPC: H01J37/16 ,  G11B9/10

CPC classification number: G11B9/10 ,  G01D15/14 ,  H01J37/18

公开(公告)号：EP0116856B1

公开(公告)日：1988-07-27

申请号：EP84100492.2

申请日：1984-01-18

Applicant: Image Graphics, Inc.

Inventor： Tarnowski, Andrew A. ,  Anderson, Brian G.

IPC: H04N1/10

CPC classification number: H04N17/04 ,  H04N1/047 ,  H04N1/1004 ,  H04N2201/02425 ,  H04N2201/0315 ,  H04N2201/04717 ,  H04N2201/04729 ,  H04N2201/04731 ,  H04N2201/04732 ,  H04N2201/04758 ,  H04N2201/04789 ,  H04N2201/04791

Abstract: A method and apparatus are described for improving the geometric fidelity of images reproduced in a charged particle beam device. The beam is deflected across a sensitive medium to form a test image of predetermined configuration. The test image is compared with a reference image and geometric deviations measured, at a number of points, are used to calculate correction signals required to modify the beam deflection to offset the deviations. Circuit adjustments are then made to provide the calculated correction signals. The correction signal adjustments are accomplished in separate non-interactive circuits for each of a plurality of predetermined corrections which only require a one time adjustment.

公开(公告)号：EP0199575A2

公开(公告)日：1986-10-29

申请号：EP86302983.1

申请日：1986-04-21

Applicant: Image Graphics, Inc.

Inventor： Tarnowski, Andrew A.

IPC: H01J37/16 ,  G11B9/10

CPC classification number: G11B9/10 ,  G01D15/14 ,  H01J37/18

Abstract: A vacuum system is provided for an apparatus for accurately tracing on an electron sensitive film with an electron beam which passes through three adjacent vacuum stages and where each stage has a predetermined vacuum level is disclosed herein. The vacuum system is a high performance, fully automatic, three-stage, differentially pumped system. Two stages (14, 16, 18) of the system respectively use diffusion pumps (50, 60) as a first pump means. The diffusion pump (60) of the second stage is backed by a single direct drive mechanical pump (64) and also acts as the backing pump for the diffusion pump (50) of the first stage. The third stage (20) uses a single direct drive mechanical pump (68) for vacuum pumping its chamber.

Abstract translation: 本发明提供了一种真空系统，用于通过电子束精确跟踪电子感光膜的设备，该电子束通过三个相邻的真空级，并且其中每个阶段具有预定的真空度。 真空系统是一种高性能，全自动，三级差动泵送系统。 该系统的两个阶段（14,16,18）分别使用扩散泵（50,60）作为第一泵装置。 第二级的扩散泵（60）由单个直接驱动机械泵（64）支撑，并且还用作第一级的扩散泵（50）的背衬泵。 第三级（20）使用单个直接驱动机械泵（68）来真空泵送其室。