公开(公告)号：EP0116856B1

公开(公告)日：1988-07-27

申请号：EP84100492.2

申请日：1984-01-18

Applicant: Image Graphics, Inc.

Inventor： Tarnowski, Andrew A. ,  Anderson, Brian G.

IPC: H04N1/10

CPC classification number: H04N17/04 ,  H04N1/047 ,  H04N1/1004 ,  H04N2201/02425 ,  H04N2201/0315 ,  H04N2201/04717 ,  H04N2201/04729 ,  H04N2201/04731 ,  H04N2201/04732 ,  H04N2201/04758 ,  H04N2201/04789 ,  H04N2201/04791

Abstract: A method and apparatus are described for improving the geometric fidelity of images reproduced in a charged particle beam device. The beam is deflected across a sensitive medium to form a test image of predetermined configuration. The test image is compared with a reference image and geometric deviations measured, at a number of points, are used to calculate correction signals required to modify the beam deflection to offset the deviations. Circuit adjustments are then made to provide the calculated correction signals. The correction signal adjustments are accomplished in separate non-interactive circuits for each of a plurality of predetermined corrections which only require a one time adjustment.

公开(公告)号：EP0116856A2

公开(公告)日：1984-08-29

申请号：EP84100492.2

申请日：1984-01-18

Applicant: Image Graphics, Inc.

Inventor： Tarnowski, Andrew A. ,  Anderson, Brian G.

IPC: H04N1/10

CPC classification number: H04N17/04 ,  H04N1/047 ,  H04N1/1004 ,  H04N2201/02425 ,  H04N2201/0315 ,  H04N2201/04717 ,  H04N2201/04729 ,  H04N2201/04731 ,  H04N2201/04732 ,  H04N2201/04758 ,  H04N2201/04789 ,  H04N2201/04791

Abstract: A method and apparatus are described for improving the geometric fidelity of images reproduced in a charged particle beam device. The beam is deflected across a sensitive medium to form a test image of predetermined configuration. The test image is compared with a reference image and geometric deviations measured, at a number of points, are used to calculate correction signals required to modify the beam deflection to offset the deviations. Circuit adjustments are then made to provide the calculated correction signals. The correction signal adjustments are accomplished in separate non-interactive circuits for each of a plurality of predetermined corrections which only require a one time adjustment.

公开(公告)号：EP0116856A3

公开(公告)日：1985-10-23

申请号：EP84100492

申请日：1984-01-18

Applicant: Image Graphics, Inc.

Inventor： Tarnowski, Andrew A. ,  Anderson, Brian G.

IPC: H04N01/10

CPC classification number: H04N17/04 ,  H04N1/047 ,  H04N1/1004 ,  H04N2201/02425 ,  H04N2201/0315 ,  H04N2201/04717 ,  H04N2201/04729 ,  H04N2201/04731 ,  H04N2201/04732 ,  H04N2201/04758 ,  H04N2201/04789 ,  H04N2201/04791

Abstract: A method and apparatus are described for improving the geometric fidelity of images reproduced in a charged particle beam device. The beam is deflected across a sensitive medium to form a test image of predetermined configuration. The test image is compared with a reference image and geometric deviations measured, at a number of points, are used to calculate correction signals required to modify the beam deflection to offset the deviations. Circuit adjustments are then made to provide the calculated correction signals. The correction signal adjustments are accomplished in separate non-interactive circuits for each of a plurality of predetermined corrections which only require a one time adjustment.