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1.发明申请MIRROR, MIRROR DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 审中-公开反射镜，反射镜装置，激光装置和极紫外发射装置
公开(公告)号：WO2012046133A2
公开(公告)日：2012-04-12
申请号：PCT/IB2011/002365
申请日：2011-10-07
Applicant: GIGAPHOTON INC. , KAMEDA, Hidenobu , WAKABAYASHI, Osamu
Inventor： KAMEDA, Hidenobu , WAKABAYASHI, Osamu
IPC: G02B7/18
CPC classification number: G02B7/1815 , G03F7/70033 , G03F7/70891 , G21K1/06 , G21K2201/065
Abstract: A mirror includes a mirror base provided with a flow channel through which a heat medium passes for cooling the mirror. The flow channel includes a buffer tank, portion for adjusting a flow rate of the heat medium in the flow channel. A reflective film is provided on the mirror base.
Abstract translation: 镜子包括设置有流动通道的镜子底座，热介质通过该流动通道来冷却镜子。 流路包括缓冲罐，用于调节流路中的热介质的流量的部分。 反光镜底座上有反光膜。
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Patent Agency Ranking2.发明申请MIRROR, MIRROR DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 审中-公开镜子，镜子装置，激光装置和极光紫外线发光装置
公开(公告)号：WO2012046133A3
公开(公告)日：2012-08-02
申请号：PCT/IB2011002365
申请日：2011-10-07
Applicant: GIGAPHOTON INC , KAMEDA HIDENOBU , WAKABAYASHI OSAMU
Inventor： KAMEDA HIDENOBU , WAKABAYASHI OSAMU
CPC classification number: G02B7/1815 , G03F7/70033 , G03F7/70891 , G21K1/06 , G21K2201/065
Abstract: A mirror includes a mirror base provided with a flow channel through which a heat medium passes for cooling the mirror. The flow channel includes a buffer tank, portion for adjusting a flow rate of the heat medium in the flow channel. A reflective film is provided on the mirror base.
Abstract translation: 反射镜包括设置有流动通道的反射镜基座，热介质通过该流动通道用于冷却反射镜。 流路包括缓冲罐，用于调节流路中的热介质的流量的部分。 反射膜设在镜底座上。
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3.发明申请LASER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR MAINTAINING THE DEVICES 审中-公开激光装置，极光紫外线发光装置和用于维持装置的方法
公开(公告)号：WO2011102534A3
公开(公告)日：2011-10-13
申请号：PCT/JP2011053881
申请日：2011-02-16
Applicant: GIGAPHOTON INC , YAMANOUCHI YOHICHI , SUGANUMA TAKASHI , FUJIMOTO JUNICHI , WAKABAYASHI OSAMU , NAKARAI HIROAKI , KAMEDA HIDENOBU , OGA HITOSHI
Inventor： YAMANOUCHI YOHICHI , SUGANUMA TAKASHI , FUJIMOTO JUNICHI , WAKABAYASHI OSAMU , NAKARAI HIROAKI , KAMEDA HIDENOBU , OGA HITOSHI
CPC classification number: G03F7/70975 , G03F7/70033 , H01S3/0071 , H01S3/03
Abstract: Provided is a laser device (1) which is installed within a predetermined space and on a predetermined floor area, the laser device includes: a master oscillator (11); at least one amplifier unit (MA) that amplifies a laser beam outputted from the master oscillator; at least one power source (D4, D5) unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface.
Abstract translation: 提供一种激光装置（1），其安装在预定空间内并在预定的楼层区域上，所述激光装置包括：主振荡器（11）; 至少一个放大单元（MA），放大从主振荡器输出的激光束; 至少一个电源（D4，D5）单元，其向所述至少一个放大器单元提供激励能量; 以及使所述至少一个放大器单元和所述至少一个电源单元中的至少一个能够在与地板表面平行的方向上移动的移动机构。
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4.发明申请WINDOW UNIT, WINDOW DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 审中-公开WINDOW单元，WINDOW设备，激光设备，以及超高亮度发光系统
公开(公告)号：WO2012026228A1
公开(公告)日：2012-03-01
申请号：PCT/JP2011/065744
申请日：2011-07-05
Applicant: GIGAPHOTON INC. , KAMEDA, Hidenobu , MORIYA, Masato , WAKABAYASHI, Osamu
Inventor： KAMEDA, Hidenobu , MORIYA, Masato , WAKABAYASHI, Osamu
CPC classification number: H01S3/0401 , G02B7/008 , H01S3/005 , H01S3/2316 , H05G2/008 , Y10T137/6851
Abstract: A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.
Abstract translation: 窗口单元可以包括：被配置为允许激光束透过其中的窗口; 以及用于在其周边保持窗口的保持器，所述保持器设置有配置成允许流体流动的内部的流动通道。
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5.发明申请LASER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR MAINTAINING THE DEVICES 审中-公开激光装置，极光紫外线发光装置和用于维持装置的方法
公开(公告)号：WO2011102534A2
公开(公告)日：2011-08-25
申请号：PCT/JP2011/053881
申请日：2011-02-16
Applicant: GIGAPHOTON INC. , YAMANOUCHI, Yohichi , SUGANUMA, Takashi , FUJIMOTO, Junichi , WAKABAYASHI, Osamu , NAKARAI, Hiroaki , KAMEDA, Hidenobu , OGA, Hitoshi
Inventor： YAMANOUCHI, Yohichi , SUGANUMA, Takashi , FUJIMOTO, Junichi , WAKABAYASHI, Osamu , NAKARAI, Hiroaki , KAMEDA, Hidenobu , OGA, Hitoshi
IPC: H01S3/00
CPC classification number: G03F7/70975 , G03F7/70033 , H01S3/0071 , H01S3/03
Abstract: Provided is a laser device which is installed within a predetermined space and on a predetermined floor area, the laser device may includes: a master oscillator; at least one amplifier unit that amplifies a laser beam outputted from the master oscillator; at least one power source unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface.
Abstract translation: 提供一种激光装置，其安装在预定空间内并在预定的地板区域上，激光装置可包括：主振荡器; 至少一个放大单元，放大从所述主振荡器输出的激光束; 至少一个电源单元，其向所述至少一个放大器单元提供激励能量; 以及使所述至少一个放大器单元和所述至少一个电源单元中的至少一个能够在与地板表面平行的方向上移动的移动机构。
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公开(公告)号：WO2011118830A1
公开(公告)日：2011-09-29
申请号：PCT/JP2011/057516
申请日：2011-03-22
Applicant: GIGAPHOTON INC. , KAMEDA, Hidenobu , WAKABAYASHI, Osamu , MORIYA, Masato
Inventor： KAMEDA, Hidenobu , WAKABAYASHI, Osamu , MORIYA, Masato
CPC classification number: G21K1/062 , B82Y10/00 , G02B5/0891 , G03F7/70891 , G03F7/70983 , G21K2201/067
Abstract: A mirror is provided which may include: a substrate (111); a thermal diffusion layer (112) provided on a principal surface of the substrate, the thermal diffusion layer having a higher thermal conductivity than the substrate; and a reflective layer (113) provided on the thermal diffusion layer, the reflective layer having a lower thermal conductivity than the thermal diffusion layer.
Abstract translation: 提供了一种可以包括：基板（111）的反射镜; 设置在所述基板的主表面上的热扩散层（112），所述热扩散层具有比所述基板更高的热导率; 以及设置在所述热扩散层上的反射层（113），所述反射层具有比所述热扩散层低的热导率。
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