公开(公告)号：WO2003065443A3

公开(公告)日：2003-08-07

申请号：PCT/US2002/038960

申请日：2002-12-04

Applicant: CASCADE MICROTECH, INC. ,  NAVRATIL, Peter ,  FROEMKE, Brad ,  STEWART, Craig ,  LORD, Anthony ,  SPENCER, Jeff ,  RUMBAUGH, Scott ,  FISHER, Gavin ,  MC CANN, Pete ,  JONES, Rod

Inventor： NAVRATIL, Peter ,  FROEMKE, Brad ,  STEWART, Craig ,  LORD, Anthony ,  SPENCER, Jeff ,  RUMBAUGH, Scott ,  FISHER, Gavin ,  MC CANN, Pete ,  JONES, Rod

IPC: H01L21/66

Abstract: The probe station (10) includes the chuck (12) that supports the electrical device (14) to be probed by the probe apparatus (16) that extends through an opening in the platen (18), an outer shield box (24) provides sufficient space for the chuck (12) to be moved laterally by positioner (22), because the chuck (12) may freely move within the outer shield box (24), a suspended member (26) electrically interconnected to a guard potential may readily position above the chuck (12).

公开(公告)号：WO03065443A2

公开(公告)日：2003-08-07

申请号：PCT/US0238960

申请日：2002-12-04

Applicant: CASCADE MICROTECH INC ,  NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MC CANN PETE ,  JONES ROD

Inventor： NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MC CANN PETE ,  JONES ROD

IPC: G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  H01L21/66

CPC classification number: G01R31/2886 ,  G01R1/18 ,  G01R31/2831 ,  G01R31/2887 ,  G01R31/311

Abstract: The probe station (10) includes the chuck (12) that supports the electrical device (14) to be probed by the probe apparatus (16) that extends through an opening in the platen (18), an outer shield box (24) provides sufficient space for the chuck (12) to be moved laterally by positioner (22), because the chuck (12) may freely move within the outer shield box (24), a suspended member (26) electrically interconnected to a guard potential may readily position above the chuck (12).

Abstract translation: 探针台（10）包括支撑电子装置（14）的卡盘（12），该探针装置（16）通过延伸穿过台板（18）中的开口的探测器装置（16）探测，外部屏蔽盒（24）提供 由于卡盘12可以在外屏蔽盒24内自由移动，所以卡盘12有足够的空间由定位器22横向移动，与保护电位电互连的悬挂构件26可以容易地 位于卡盘（12）上方的位置。