MICROELECTROMECHANICAL MAGNETIC SWITCHES HAVING ROTORS THAT ROTATE INTO A RECESS IN A SUBSTRATE, AND METHODS OF OPERATING AND FABRICATING SAME
    1.
    发明申请
    MICROELECTROMECHANICAL MAGNETIC SWITCHES HAVING ROTORS THAT ROTATE INTO A RECESS IN A SUBSTRATE, AND METHODS OF OPERATING AND FABRICATING SAME 审中-公开
    具有旋转到基板中的转子的微电子磁性开关,以及操作和制造方法

    公开(公告)号:WO2005006365A1

    公开(公告)日:2005-01-20

    申请号:PCT/US2004/018576

    申请日:2004-06-14

    Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

    Abstract translation: 磁开关包括其中具有凹部的基板。 转子或转子设置在基板上。 该转子包括一个位于该凹部之上的尾部,以及一个在凹槽外部的基底上延伸的头部。 转子可以由铁磁材料制成,并且被配置为响应于改变的磁场而使凹部中的尾部旋转。 还提供了第一和第二磁性开关触点,其被配置为响应于改变的磁场而响应于凹部中尾部的旋转而彼此之间形成或断开电连接。 还描述了相关的操作和制造方法。

    包括熱隔離架構之熱致動微機電系統
    2.
    发明专利
    包括熱隔離架構之熱致動微機電系統 失效
    包括热隔离架构之热致动微机电系统

    公开(公告)号:TW593913B

    公开(公告)日:2004-06-21

    申请号:TW089123491

    申请日:2000-11-24

    IPC: F16K

    CPC classification number: H01H1/0036 F16K31/002 H01H61/02 H01H2061/006

    Abstract: 本發明指示一微機電結構,包含一微電子基板及在此微電子基板上的間隔支撐,柄桿延伸在此間隔支撐之間並在對之加熱時膨脹,藉之造成柄桿在間隔支撐間的移動,對柄桿的加熱產生從柄桿經間隔支撐而進入基板的熱傳導路徑,熱傳導路徑中的熱隔離結構降低來自柄桿的熱傳導,經由間隔支撐並進入基板,相較於沒有熱隔離結構的情形。熱隔離結構最好比柄桿及支撐有較低之熱傳導,維持在柄桿中的熱可藉之增加,此熱隔離結構在柄桿的每一端可包含一熱隔離結構,在每個間隔支撐中的一熱隔離結構,在相鄰每個間隔支撐的基板中的熱隔離結構,及/或至少柄桿中的一熱隔離結構。因此,可以提供改良的微機電結構之熱效率,藉之可有較低的功率,較高的偏向,較大的力量及/或較高的速度。

    Abstract in simplified Chinese: 本发明指示一微机电结构,包含一微电子基板及在此微电子基板上的间隔支撑,柄杆延伸在此间隔支撑之间并在对之加热时膨胀,藉之造成柄杆在间隔支撑间的移动,对柄杆的加热产生从柄杆经间隔支撑而进入基板的热传导路径,热传导路径中的热隔离结构降低来自柄杆的热传导,经由间隔支撑并进入基板,相较于没有热隔离结构的情形。热隔离结构最好比柄杆及支撑有较低之热传导,维持在柄杆中的热可藉之增加,此热隔离结构在柄杆的每一端可包含一热隔离结构,在每个间隔支撑中的一热隔离结构,在相邻每个间隔支撑的基板中的热隔离结构,及/或至少柄杆中的一热隔离结构。因此,可以提供改良的微机电结构之热效率,藉之可有较低的功率,较高的偏向,较大的力量及/或较高的速度。

    內部具有減數反射器之微機電光學互連交換器及其操作方法
    3.
    发明专利
    內部具有減數反射器之微機電光學互連交換器及其操作方法 失效
    内部具有减数反射器之微机电光学互连交换器及其操作方法

    公开(公告)号:TW591245B

    公开(公告)日:2004-06-11

    申请号:TW090109432

    申请日:2001-04-19

    IPC: G02B

    CPC classification number: H04Q11/0005 H04Q2011/0026

    Abstract: 一種精簡組態之「光學互連(OXC)」交換器,可包括接往該OXC的N個輸入以及源自該OXC的N個輸出,其中N為至少3者。該N×N OXC交換器可提供N!種狀態,在此該 N!種狀態可依需要將該些N個輸入之任者光學耦接至該些 N個輸出之任者。該N×N OXC交換器也包括諸多交換節點,可選擇性地被光學耦接到該等N個輸入和N個輸出。這些諸交換節點各個皆可於交換組態設定以及傳通組態設定兩者中至少一者裡設定其組態,俾由此選擇性地提供經交換之光學輻射,且其中諸交換節點數目等於 ceiling[ln(N!)/ln(2)],以提供該N×N OXC交換器的 N!種狀態。該N×N OXC交換器可進一步包括至少一個耦接於諸交換節點裡至少兩個的光學傳送裝置。在此亦揭示各項相關方法。

    Abstract in simplified Chinese: 一种精简组态之“光学互连(OXC)”交换器,可包括接往该OXC的N个输入以及源自该OXC的N个输出,其中N为至少3者。该N×N OXC交换器可提供N!种状态,在此该 N!种状态可依需要将该些N个输入之任者光学耦接至该些 N个输出之任者。该N×N OXC交换器也包括诸多交换节点,可选择性地被光学耦接到该等N个输入和N个输出。这些诸交换节点各个皆可于交换组态设置以及传通组态设置两者中至少一者里设置其组态,俾由此选择性地提供经交换之光学辐射,且其中诸交换节点数目等于 ceiling[ln(N!)/ln(2)],以提供该N×N OXC交换器的 N!种状态。该N×N OXC交换器可进一步包括至少一个耦接于诸交换节点里至少两个的光学发送设备。在此亦揭示各项相关方法。

    包含平行固定及可移動反射器之波長塞取光學開關及其製法
    4.
    发明专利
    包含平行固定及可移動反射器之波長塞取光學開關及其製法 失效
    包含平行固定及可移动反射器之波长塞取光学开关及其制法

    公开(公告)号:TW576929B

    公开(公告)日:2004-02-21

    申请号:TW090106331

    申请日:2001-03-19

    IPC: G02B

    Abstract: 波長塞取開關係包括固定反射器(譬如固定鏡面)以及可移動反射器(譬如可移動鏡面),其中當提供波長塞取功能的可移動反射器處於一輻射反射位置中時,任何的固定反射器及任何的可移動反射器在一基材上均不互呈正交狀定向,較佳實施例中,當可移動反射器位於輻射反射位置時,各個固定及可移動反射器係與其餘部份的固定及可移動反射器呈平行狀或70°角定向。最佳,當可移動反射器處於輻射反射位置時,固定反射器及可移動反射器均在基材上呈平行狀定向。由於固定及可移動反射器具有這些定向,可利用沿著晶體面的濕蝕刻在矽基材上製造波長塞取光學開關,以提供高性能約波長塞取光學開關。

    Abstract in simplified Chinese: 波长塞取开关系包括固定反射器(譬如固定镜面)以及可移动反射器(譬如可移动镜面),其中当提供波长塞取功能的可移动反射器处于一辐射反射位置中时,任何的固定反射器及任何的可移动反射器在一基材上均不互呈正交状定向,较佳实施例中,当可移动反射器位于辐射反射位置时,各个固定及可移动反射器系与其余部份的固定及可移动反射器呈平行状或70°角定向。最佳,当可移动反射器处于辐射反射位置时,固定反射器及可移动反射器均在基材上呈平行状定向。由于固定及可移动反射器具有这些定向,可利用沿着晶体面的湿蚀刻在硅基材上制造波长塞取光学开关,以提供高性能约波长塞取光学开关。

    Microelectromechanical magnetic switches having rotors that rotate into a recess in a substrate, and methods of operating and fabricating same
    5.
    发明申请
    Microelectromechanical magnetic switches having rotors that rotate into a recess in a substrate, and methods of operating and fabricating same 有权
    具有旋转到衬底中的凹部的转子的微机电磁开关及其操作和制造方法

    公开(公告)号:US20040263297A1

    公开(公告)日:2004-12-30

    申请号:US10859633

    申请日:2004-06-03

    Applicant: MEMSCAP, Inc.

    Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

    Abstract translation: 磁开关包括其中具有凹部的基板。 转子或转子设置在基板上。 转子包括覆盖凹部的尾部和在凹部外部的衬底上延伸的头部。 转子可以由铁磁材料制成,并且被配置为响应于改变的磁场而使凹部中的尾部旋转。 第一和第二磁性开关触点还被设置成响应于改变的磁场而响应于凹部中的尾部的旋转而使彼此之间的电连接彼此形成或断开。 还描述了相关操作和制造方法。

    MICROELECTROMECHANICAL MAGNETIC SWITCHES HAVING ROTORS THAT ROTATE INTO A RECESS IN A SUBSTRATE AND METHODS OF OPERATING AND FABRICATING SAME

    公开(公告)号:IL172720D0

    公开(公告)日:2006-04-10

    申请号:IL17272005

    申请日:2005-12-20

    Applicant: MEMSCAP INC

    Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

    7.
    发明专利
    未知

    公开(公告)号:DE602004004898D1

    公开(公告)日:2007-04-05

    申请号:DE602004004898

    申请日:2004-06-14

    Applicant: MEMSCAP INC

    Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

    9.
    发明专利
    未知

    公开(公告)号:DE602004004898T9

    公开(公告)日:2007-10-18

    申请号:DE602004004898

    申请日:2004-06-14

    Applicant: MEMSCAP INC

    Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

    10.
    发明专利
    未知

    公开(公告)号:DE602004004898T2

    公开(公告)日:2007-06-28

    申请号:DE602004004898

    申请日:2004-06-14

    Applicant: MEMSCAP INC

    Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

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