Abstract:
A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.
Abstract in simplified Chinese:本发明指示一微机电结构,包含一微电子基板及在此微电子基板上的间隔支撑,柄杆延伸在此间隔支撑之间并在对之加热时膨胀,藉之造成柄杆在间隔支撑间的移动,对柄杆的加热产生从柄杆经间隔支撑而进入基板的热传导路径,热传导路径中的热隔离结构降低来自柄杆的热传导,经由间隔支撑并进入基板,相较于没有热隔离结构的情形。热隔离结构最好比柄杆及支撑有较低之热传导,维持在柄杆中的热可藉之增加,此热隔离结构在柄杆的每一端可包含一热隔离结构,在每个间隔支撑中的一热隔离结构,在相邻每个间隔支撑的基板中的热隔离结构,及/或至少柄杆中的一热隔离结构。因此,可以提供改良的微机电结构之热效率,藉之可有较低的功率,较高的偏向,较大的力量及/或较高的速度。
Abstract in simplified Chinese:波长塞取开关系包括固定反射器(譬如固定镜面)以及可移动反射器(譬如可移动镜面),其中当提供波长塞取功能的可移动反射器处于一辐射反射位置中时,任何的固定反射器及任何的可移动反射器在一基材上均不互呈正交状定向,较佳实施例中,当可移动反射器位于辐射反射位置时,各个固定及可移动反射器系与其余部份的固定及可移动反射器呈平行状或70°角定向。最佳,当可移动反射器处于辐射反射位置时,固定反射器及可移动反射器均在基材上呈平行状定向。由于固定及可移动反射器具有这些定向,可利用沿着晶体面的湿蚀刻在硅基材上制造波长塞取光学开关,以提供高性能约波长塞取光学开关。
Abstract:
A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.
Abstract:
A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.
Abstract:
A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.
Abstract:
A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outsid e the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magneti c field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described .
Abstract:
A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.
Abstract:
A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.