Microelectromechanical magnetic switches having rotors that rotate into a recess in a substrate, and methods of operating and fabricating same
    1.
    发明申请
    Microelectromechanical magnetic switches having rotors that rotate into a recess in a substrate, and methods of operating and fabricating same 有权
    具有旋转到衬底中的凹部的转子的微机电磁开关及其操作和制造方法

    公开(公告)号:US20040263297A1

    公开(公告)日:2004-12-30

    申请号:US10859633

    申请日:2004-06-03

    Applicant: MEMSCAP, Inc.

    Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

    Abstract translation: 磁开关包括其中具有凹部的基板。 转子或转子设置在基板上。 转子包括覆盖凹部的尾部和在凹部外部的衬底上延伸的头部。 转子可以由铁磁材料制成,并且被配置为响应于改变的磁场而使凹部中的尾部旋转。 第一和第二磁性开关触点还被设置成响应于改变的磁场而响应于凹部中的尾部的旋转而使彼此之间的电连接彼此形成或断开。 还描述了相关操作和制造方法。

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