Abstract:
The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.
Abstract:
Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.
Abstract:
The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.
Abstract:
The invention relates to an insect trap which has been designed to facilitate simple and efficient servicing, maintenance and cleaning. The trap includes a back housing; a frame swing mounted to said housing; and a cover comprising openings allowing insects to enter the trap and the frame supports at least one light such that said frame and lights can be moved from a first position where they overlie the back housing, to a second position where they lie clear of the back housing such that an insect catching means which may be fitted over the back housing is readily accessible for replacement during servicing. Additionally, the trap is adapted for ease of servicing and jet cleaning by the provision of shields each of which sealably protect, from water ingress, the plurality of lights at the positions where they connect to electrical fittings.