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公开(公告)号：AU2003288897A8
公开(公告)日：2004-04-30
申请号：AU2003288897
申请日：2003-08-15
Applicant: NORCOM SYSTEMS INC
Inventor： THAYER STEVE , NEWMAN JOHN W
Abstract: A system and method for leak testing a plurality of hermetic electronic packages of the type that have an internal chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a manner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic packages within a test area, and then stimulating the hermetic electronic packages with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic packages is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is determined for each individual device that is substantially independent of variances, such as differences in lid thickness that may exist between the different devices. Accordingly, an accurate determination of leak rate may be made with a minimum of calibration.
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Patent Agency Ranking
公开(公告)号：AU2003288897A1
公开(公告)日：2004-04-30
申请号：AU2003288897
申请日：2003-08-15
Applicant: NORCOM SYSTEMS INC
Inventor： NEWMAN JOHN W , THAYER STEVE
Abstract: A system and method for leak testing a plurality of hermetic electronic packages of the type that have an internal chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a manner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic packages within a test area, and then stimulating the hermetic electronic packages with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic packages is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is determined for each individual device that is substantially independent of variances, such as differences in lid thickness that may exist between the different devices. Accordingly, an accurate determination of leak rate may be made with a minimum of calibration.
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公开(公告)号：WO2004025239A2
公开(公告)日：2004-03-25
申请号：PCT/US2003/025588
申请日：2003-08-15
Applicant: NORCOM SYSTEMS INC.
Inventor： NEWMAN, John, W. , THAYER, Steve
IPC: G01M
CPC classification number: G01M3/363 , G01N2201/0227 , G03H1/0443
Abstract: A system and method for leak testing a plurality of hermetic electronic devices of the type that have an internai chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a marner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic devices within a test area, and then stimulating the hermetic electronic devices with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic devices is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is determined for each individual device that is substantially independent of variances, such as differences in lid thickness that may exist between the different devices. Accordingly, an accurate determination of leak rate may be made with a minimum of calibration.
Abstract translation: 用于泄漏测试多个具有通过密封结构与环境条件隔离的内部室的类型的密封电子设备的系统和方法有利地设计成能够计算每个单独设备的泄漏率， 独立于通常存在于这种设备的采样内的结构制造差异。 该方法优选地包括将多个密封电子设备定位在测试区域内，然后利用调制的能量输入来刺激密封电子设备，例如通过改变围绕设备的环境压力。 然后感测诸如每个密封电子设备的盖子的一部分的物理位置的属性。 感测的特性是已知的作为调制的能量输入的第一函数而变化的属性，并且还作为密封的内部腔室内的压力条件的第二函数。 第一和第二功能彼此线性独立。 通过将装置的刺激与感测到的属性进行比较，并且通过使用两个已知功能进行区分，确定每个单独装置的泄漏率基本上不依赖于方差，例如可能存在于不同装置之间的盖厚度的差异。 因此，可以用最小的校准来进行泄漏率的精确确定。
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公开(公告)号：WO2004025239A3
公开(公告)日：2004-07-29
申请号：PCT/US0325588
申请日：2003-08-15
Applicant: NORCOM SYSTEMS INC
Inventor： NEWMAN JOHN W , THAYER STEVE
CPC classification number: G01M3/363 , G01N2201/0227 , G03H1/0443
Abstract: A system and method for leak testing a plurality of hermetic electronic devices of the type that have an internai chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a marner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic devices within a test area, and then stimulating the hermetic electronic devices with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic devices is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is determined for each individual device that is substantially independent of variances, such as differences in lid thickness that may exist between the different devices. Accordingly, an accurate determination of leak rate may be made with a minimum of calibration.
Abstract translation: 用于泄漏测试具有通过密封结构与环境条件隔离的内室的类型的多个密封电子设备的系统和方法有利地被设计为能够计算每个单独设备的泄漏率， 独立于通常存在于这样的设备的抽样中的结构制造差异。 该方法优选地涉及将多个密封电子设备定位在测试区域内，然后通过例如通过改变关于设备的环境压力来以调制的能量输入来刺激密封电子设备。 然后感测诸如每个密封电子装置的盖的一部分的物理位置的属性。 感测到的特性是已知作为调制输入能量的第一功能而改变的特性，并且也是密封的内室中的压力条件的第二功能。 第一和第二功能彼此线性独立。 通过将设备的刺激与感测到的特性进行比较并且通过使用两种已知功能进行区分，针对每个单独的设备确定基本上与方差无关的泄漏率，例如不同设备之间可能存在的盖厚度差异。 因此，可以用最少的校准来进行泄漏率的精确确定。
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公开(公告)号：EP1540317A2
公开(公告)日：2005-06-15
申请号：EP03781284.9
申请日：2003-08-15
Applicant: Norcom Systems Inc.
Inventor： NEWMAN, John, W. , THAYER, Steve
IPC: G01N21/88
CPC classification number: G01M3/363 , G01N2201/0227 , G03H1/0443
Abstract: A system and method for leak testing a plurality of hermetic electronic devices of the type that have an internai chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a marner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic devices within a test area, and then stimulating the hermetic electronic devices with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic devices is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is determined for each individual device that is substantially independent of variances, such as differences in lid thickness that may exist between the different devices. Accordingly, an accurate determination of leak rate may be made with a minimum of calibration.
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公开(公告)号：EP1540317A4
公开(公告)日：2010-06-30
申请号：EP03781284
申请日：2003-08-15
Applicant: NORCOM SYSTEMS INC
Inventor： NEWMAN JOHN W , THAYER STEVE
CPC classification number: G01M3/363 , G01N2201/0227 , G03H1/0443
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