公开(公告)号：WO2004025239A2

公开(公告)日：2004-03-25

申请号：PCT/US2003/025588

申请日：2003-08-15

Applicant: NORCOM SYSTEMS INC.

Inventor： NEWMAN, John, W. ,  THAYER, Steve

IPC: G01M

CPC classification number: G01M3/363 ,  G01N2201/0227 ,  G03H1/0443

Abstract: A system and method for leak testing a plurality of hermetic electronic devices of the type that have an internai chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a marner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic devices within a test area, and then stimulating the hermetic electronic devices with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic devices is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is determined for each individual device that is substantially independent of variances, such as differences in lid thickness that may exist between the different devices. Accordingly, an accurate determination of leak rate may be made with a minimum of calibration.

Abstract translation: 用于泄漏测试多个具有通过密封结构与环境条件隔离的内部室的类型的密封电子设备的系统和方法有利地设计成能够计算每个单独设备的泄漏率， 独立于通常存在于这种设备的采样内的结构制造差异。 该方法优选地包括将多个密封电子设备定位在测试区域内，然后利用调制的能量输入来刺激密封电子设备，例如通过改变围绕设备的环境压力。 然后感测诸如每个密封电子设备的盖子的一部分的物理位置的属性。 感测的特性是已知的作为调制的能量输入的第一函数而变化的属性，并且还作为密封的内部腔室内的压力条件的第二函数。 第一和第二功能彼此线性独立。 通过将装置的刺激与感测到的属性进行比较，并且通过使用两个已知功能进行区分，确定每个单独装置的泄漏率基本上不依赖于方差，例如可能存在于不同装置之间的盖厚度的差异。 因此，可以用最小的校准来进行泄漏率的精确确定。

公开(公告)号：EP1540317A2

公开(公告)日：2005-06-15

申请号：EP03781284.9

申请日：2003-08-15

Applicant: Norcom Systems Inc.

Inventor： NEWMAN, John, W. ,  THAYER, Steve

IPC: G01N21/88

CPC classification number: G01M3/363 ,  G01N2201/0227 ,  G03H1/0443

Abstract: A system and method for leak testing a plurality of hermetic electronic devices of the type that have an internai chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a marner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic devices within a test area, and then stimulating the hermetic electronic devices with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic devices is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is determined for each individual device that is substantially independent of variances, such as differences in lid thickness that may exist between the different devices. Accordingly, an accurate determination of leak rate may be made with a minimum of calibration.