公开(公告)号：WO2008061097A3

公开(公告)日：2008-07-10

申请号：PCT/US2007084568

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC ,  STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

Inventor： STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: G02B26/00 ,  H01L27/00

CPC classification number: G02B26/0841

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

Abstract translation: 在相邻电极之间设置有基于MEMS的反射镜，以便能够承受相对较高的施加电压，从而基本上减少暴露于不受控制的表面电位。 基于MEMS的反射镜，因此避免了电压漂移，并具有改进的镜面位置稳定性。 选择沟槽尺寸，使得施加在每个相邻电极对之间的电压保持在预定义的限度内。 诸如二氧化硅的绝缘层电隔离每对相邻的电极。 每个绝缘层部分地在相关联的沟槽上方延伸，并且其特征在于相同的高度和宽度尺寸。

公开(公告)号：WO2008061101A3

公开(公告)日：2008-07-03

申请号：PCT/US2007084575

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC ,  FERNANDEZ ANDRES ,  STAKER BRYAN P ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

Inventor： FERNANDEZ ANDRES ,  STAKER BRYAN P ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: H01L21/00

CPC classification number: B32B37/1292 ,  B32B7/12 ,  B32B2309/68 ,  B32B2457/00 ,  B81C3/001 ,  B81C2203/032 ,  B81C2203/035 ,  Y10T428/24612 ,  Y10T428/2462

Abstract: One or more cavities are formed in the bonding surfaces of one, all, or some of the elements to be bonded. These cavities serve as receptacles for the bonding material and are where the bonds are localized. The cavities are of sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements are brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mated with nominally zero separation. Once solidified, the bonding material forms a localized bond inside each cavity. Different cavity shapes, such as, rectangular, circular, or any other shape that can be injected or filled with adhesive material may be used.

Abstract translation: 在待结合的一个，全部或一些元件的接合表面中形成一个或多个空腔。 这些空腔用作接合材料的接收器，并且是键的位置。 空腔具有足够的尺寸和形状，使得它们的体积大于形成结合的粘合材料的体积。 这确保了当元件彼此接触以配合时，可以在凝固成粘合之前流动的粘合材料将流入空腔中，并且不会阻碍部件的分离。 这允许零件与标称零分离配合。 一旦固化，接合材料在每个空腔内形成局部粘合。 可以使用不同的腔体形状，例如矩形，圆形或可以用粘合剂材料注射或填充的任何其它形状。

公开(公告)号：WO2008070764A2

公开(公告)日：2008-06-12

申请号：PCT/US2007/086616

申请日：2007-12-06

Applicant: GLIMMERGLASS NETWORKS, INC. ,  STAKER, Bryan, P. ,  FERNANDEZ, Andres ,  KINDWALL, Alexander, P. ,  OWENS, Windsor, E.

Inventor： STAKER, Bryan, P. ,  FERNANDEZ, Andres ,  KINDWALL, Alexander, P. ,  OWENS, Windsor, E.

CPC classification number: G02B6/3556 ,  G02B6/357 ,  G02B26/0841

Abstract: An array of MEMS devices is formed on a planar substrate having in each of a plurality of annular regions or sectors a plurality of MEMS mirrors of substantially identical structure, wherein the MEMS mirrors in each region have an identical pre-tilt. The pre-tilt is achieved by embedding each dual-axis tiltable mirror within a pre-tilted microplatform or gimbal. In a specific embodiment, one microplatform of a preselected pre-tilt is provided for each micromirror and an underlying electrode is provided having a shape conforming with the pre-tilt. In a specific embodiment, the annular regions are contiguous elliptical or ovoidal regions. By pre-tilt, it is meant that the rest state or nonactuated state of the micro-mirror is such that a reflected beam from a fixed source is directed to the center of a target array.

Abstract translation: 在平面衬底上形成MEMS器件阵列，该平面衬底在多个环形区域或扇区中的每一个中具有基本上相同结构的多个MEMS反射镜，其中每个区域中的MEMS反射镜具有相同的 预倾斜。 通过将每个双轴可倾斜反射镜嵌入预倾斜微平台或万向节内来实现预倾斜。 在特定实施例中，为每个微镜提供预选预倾斜的一个微平台，并且提供具有与预倾斜一致的形状的下电极。 在一个具体实施例中，环形区域是连续的椭圆形或卵形区域。 通过预倾斜，意味着微镜的静止状态或非启动状态使得来自固定源的反射光束被引导至目标阵列的中心。

公开(公告)号：WO2008061101A2

公开(公告)日：2008-05-22

申请号：PCT/US2007/084575

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS, INC. ,  FERNANDEZ, Andres ,  STAKER, Bryan, P. ,  KINDWALL, Alexander, P. ,  OWENS, Windsor, E.

Inventor： FERNANDEZ, Andres ,  STAKER, Bryan, P. ,  KINDWALL, Alexander, P. ,  OWENS, Windsor, E.

IPC: B32B7/14 ,  B32B37/02 ,  B32B37/14

CPC classification number: B32B37/1292 ,  B32B7/12 ,  B32B2309/68 ,  B32B2457/00 ,  B81C3/001 ,  B81C2203/032 ,  B81C2203/035 ,  Y10T428/24612 ,  Y10T428/2462

Abstract: One or more cavities are formed in the bonding surfaces of one, all, or some of the elements to be bonded. These cavities serve as receptacles for the bonding material and are where the bonds are localized. The cavities are of sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements are brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mated with nominally zero separation. Once solidified, the bonding material forms a localized bond inside each cavity. Different cavity shapes, such as, rectangular, circular, or any other shape that can be injected or filled with adhesive material may be used.

Abstract translation: 一个或多个空腔形成在待粘合的一个，全部或一些元件的粘合表面中。 这些空腔用作结合材料的容器并且是结合部位的位置。 腔体具有足够的尺寸和形状，使得它们的体积大于形成结合的结合材料的体积。 这确保了当元件彼此接触以配合时，在凝固成结合之前可以流动的结合材料将流入空腔并且不会阻止部件的分离。 这允许零件与名义上的零分离配合。 一旦固化，结合材料在每个腔内形成局部结合。 可以使用不同的空腔形状，例如矩形，圆形或可以注入或填充有粘合材料的任何其他形状。

公开(公告)号：WO2008061097A2

公开(公告)日：2008-05-22

申请号：PCT/US2007/084568

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS, INC. ,  STAKER, Bryan, P. ,  FERNANDEZ, Andres ,  KINDWALL, Alexander, P. ,  OWENS, Windsor, E.

Inventor： STAKER, Bryan, P. ,  FERNANDEZ, Andres ,  KINDWALL, Alexander, P. ,  OWENS, Windsor, E.

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

Abstract translation: 基于MEMS的反射镜在相邻电极之间设置有沟槽，以便能够承受相对较高的施加电压，并且因此显着降低了暴露于不受控制的表面电位。 基于MEMS的反射镜可避免电压漂移，并具有改进的反射镜位置稳定性。 选择沟槽尺寸，使得在每个相邻电极对之间施加的电压保持在预定限度内。 诸如二氧化硅的绝缘层将每对相邻的电极电隔离。 每个绝缘层部分地延伸到相关沟槽的上方，并且具有相同的高度和宽度尺寸。

公开(公告)号：WO2008070764A3

公开(公告)日：2008-09-12

申请号：PCT/US2007086616

申请日：2007-12-06

Applicant: GLIMMERGLASS NETWORKS INC ,  STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

Inventor： STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: G02B26/08 ,  G02B6/35

CPC classification number: G02B6/3556 ,  G02B6/357 ,  G02B26/0841

Abstract: An array of MEMS devices is formed on a planar substrate having in each of a plurality of annular regions or sectors a plurality of MEMS mirrors of substantially identical structure, wherein the MEMS mirrors in each region have an identical pre-tilt. The pre-tilt is achieved by embedding each dual-axis tiltable mirror within a pre-tilted microplatform or gimbal. In a specific embodiment, one microplatform of a preselected pre-tilt is provided for each micromirror and an underlying electrode is provided having a shape conforming with the pre-tilt. In a specific embodiment, the annular regions are contiguous elliptical or ovoidal regions. By pre-tilt, it is meant that the rest state or nonactuated state of the micro-mirror is such that a reflected beam from a fixed source is directed to the center of a target array.

Abstract translation: 在平面基板上形成MEMS器件的阵列，其具有在多个环形区域或扇区中的每一个中具有基本相同结构的多个MEMS反射镜，其中每个区域中的MEMS反射镜具有相同的预倾斜。 预倾斜是通过将每个双轴可倾斜镜嵌入预倾斜的微平台或万向节来实现的。 在具体实施例中，为每个微反射镜提供预选的预倾角的一个微平台，并且提供具有与预倾斜一致的形状的底层电极。 在具体实施例中，环形区域是相邻的椭圆形或椭圆形区域。 通过预倾斜，意味着微镜的静止状态或非激活状态使得来自固定源的反射光束被引导到目标阵列的中心。