公开(公告)号：KR20200143383A

公开(公告)日：2020-12-23

申请号：KR20207029164

申请日：2020-05-08

Applicant: PHOTO ELECTRON SOUL INC

Inventor： KOIZUMI ATSUSHI ,  IIJIMA HOKUTO

IPC: H01J37/252 ,  H01J37/073 ,  H01J37/28

Abstract: 전자총이구비하는구성만으로, 포토캐소드로부터방출된전자빔의강도를직접모니터할수 있는전자총, 전자총을탑재한전자선적용장치, 및, 전자총의제어방법을제공하는것을과제로한다. 광원과, 광원으로부터의수광에따라, 전자빔을방출하는포토캐소드와, 애노드와, 전자빔의일부를차폐할수 있는전자빔 차폐부재와, 전자빔 차폐부재에의해차폐한측정용전자빔을이용하여, 포토캐소드로부터방출된전자빔의강도를측정하는측정부를포함하는전자총에의해과제를해결할수 있다.

公开(公告)号：KR20200130420A

公开(公告)日：2020-11-18

申请号：KR20207029333

申请日：2019-08-07

Applicant: PHOTO ELECTRON SOUL INC

Inventor： IIJIMA HOKUTO

IPC: H01J37/073 ,  H01J1/34

Abstract: 전자총을상대측장치에탑재한후에, 전자빔의초점을단초점측 및장초점측으로조정할수 있는장치를제공하는것을과제로한다. 포토캐소드와, 애노드를포함하는전자총으로서, 상기전자총은, 상기포토캐소드와상기애노드사이에배치하는중간전극을추가로포함하고, 상기중간전극은, 상기포토캐소드로부터사출한전자빔이통과하는전자빔 통과구멍을가지며, 상기전자빔 통과구멍에는, 전압의인가에의해상기포토캐소드와상기애노드사이에전계가형성되었을때에, 상기전계의영향을무시할수 있는드리프트스페이스가형성되어있는, 전자총에의해과제를해결할수 있다.

公开(公告)号：KR20210008074A

公开(公告)日：2021-01-20

申请号：KR20207035601

申请日：2019-05-14

Applicant: PHOTO ELECTRON SOUL INC

Inventor： WATANABE REIKI ,  NISHITANI TOMOHIRO ,  KOIZUMI ATSUSHI ,  SHIKANO HARUKA

IPC: H01J1/34 ,  B23K15/00 ,  H01J37/073

Abstract: 포토캐소드를탑재한전자총으로부터사출되는전자빔을, 전자광학계의입사축으로자동적으로조정하기위한방법을제공하는것을과제로한다. 포토캐소드를탑재한전자총의입사축맞춤방법으로서, 상기전자총은, 상기포토캐소드에여기광을조사함으로써제1의상태의전자빔을사출할수 있고, 상기방법은, 여기광조사공정과, 상기포토캐소드로의상기여기광의조사위치를변화시켜, 상기여기광의조사위치를조정하는제1 여기광조사위치조정공정과, 상기제1의상태의전자빔의중심선과전자광학계의입사축이일치했는지여부를검출하는전자빔 중심검출공정을적어도포함하는, 입사축맞춤방법에의해, 과제를해결할수 있다.

公开(公告)号：TWI696206B

公开(公告)日：2020-06-11

申请号：TW107134058

申请日：2018-09-27

Applicant: 日商PHOTO ELECTRON SOUL股份有限公司 ,  PHOTO ELECTRON SOUL INC.

Inventor： 西谷智博 ,  NISHITANI, TOMOHIRO ,  小泉淳 ,  KOIZUMI, ATSUSHI ,  川俣智章 ,  KAWAMATA, TOMOAKI ,  鹿野悠 ,  SHIKANO, HARUKA

IPC: H01J3/36 ,  H01J3/32 ,  H01J1/88

公开(公告)号：US20250132117A1

公开(公告)日：2025-04-24

申请号：US18689842

申请日：2022-09-05

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro NISHITANI

IPC: H01J37/073 ,  H01J37/244 ,  H01J37/28 ,  H01J37/285

Abstract: An object is to provide a creation method of detection data based on a novel principle. The creation method includes: an electron beam irradiation step of irradiating an irradiation region with an electron beam; a detection step of detecting an emission quantity data from the irradiation region and generating a detection signal; a quantity of light adjustment step of adjusting a quantity of light reaching a photocathode from a light source so that a signal intensity of the detection signal is a preset value; a step of repeating the electron beam irradiation step, the detection step, and the quantity of light adjustment step until the signal intensity of the detection signal becomes the preset value; and a detection data output step of outputting the quantity of light adjustment data where the signal intensity of the detection signal is the preset value as detection data on the irradiation region.

公开(公告)号：US20240212967A1

公开(公告)日：2024-06-27

申请号：US18556080

申请日：2022-03-25

Applicant: Photo electron Soul Inc.

Inventor： Tomohiro NISHITANI

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J2237/0473 ,  H01J2237/06333 ,  H01J2237/0653 ,  H01J2237/0835 ,  H01J2237/30483

Abstract: Provided is an electron gun that can have a setting to make it possible to irradiate a desired location on an irradiation target with an electron beam having a desired electron beam parameter by using only the component included in the electron gun. This object can be achieved by an electron gun including: a light source; a photocathode configured to generate releasable electrons in response to receiving light from the light source; an anode configured to generate an electric field between the photocathode and the anode, extract the releasable electrons by the generated electric field, and form an electron beam; and a control unit, and the control unit sets the number of emission times of the electron beam and sets an electron beam parameter for each emitting electron beam, or sets an emission duration of the electron beam and sets an electron beam parameter of an emitting electron beam in association with the emission duration.

公开(公告)号：US20230230794A1

公开(公告)日：2023-07-20

申请号：US17996215

申请日：2021-03-30

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Daiki Sato

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J2237/06333 ,  H01J2237/0653 ,  H01J2237/30472

Abstract: An object is to provide an electron gun that can extend the lifetime of a photocathode. The object can be achieved by an electron gun including: a substrate having a photocathode film formed on a first face; a light source for irradiating the photocathode film with excitation light; an anode; a heater device for heating the photocathode film and/or the substrate; and an output adjustment device that adjusts a heating temperature of the heater device.

公开(公告)号：US12198889B2

公开(公告)日：2025-01-14

申请号：US17044850

申请日：2020-05-08

Applicant: Photo electron Soul Inc.

Inventor： Atsushi Koizumi ,  Hokuto Iijima

IPC: H01J37/073 ,  H01J37/063

Abstract: The present disclosure addresses the problem of providing an electron gun that can directly monitor an intensity of an electron beam emitted from a photocathode using only the configuration provided to the electron gun, an electron beam applicator equipped with an electron gun, and a method for controlling an electron gun.
The aforementioned problem can be solved by an electron gun comprising a light source, a photocathode that emits an electron beam in response to receiving light from the light source, an anode, an electron-beam-shielding member with which it is possible to shield part of the electron beam, and a measurement unit that measures the intensity of the electron beam emitted from the photocathode using a measurement electron beam shielded by the electron-beam-shielding member.

公开(公告)号：US11417494B2

公开(公告)日：2022-08-16

申请号：US17055984

申请日：2019-05-14

Applicant: Photo electron Soul Inc.

Inventor： Reiki Watanabe ,  Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: H01J37/147 ,  H01J37/073 ,  H01J3/02 ,  H01J1/34

Abstract: The present invention addresses the problem of providing a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to the incident axis of an electron optical system.
[Solution] An incident axis alignment method for an electron gun equipped with a photocathode, the electron gun being capable of emitting an electron beam in a first state due to the photocathode being irradiated with excitation light, and the method including at least an excitation light radiation step, a first excitation light irradiation position adjustment step for changing the irradiation position of the excitation light on the photocathode and adjusting the irradiation position of the excitation light, and an electron beam center detection step for detecting whether a center line of the electron beam in the first state coincides with an incident axis of an electron optical system.

公开(公告)号：US12033827B2

公开(公告)日：2024-07-09

申请号：US17604368

申请日：2020-07-31

Applicant: Photo electron Soul Inc.

Inventor： Haruka Shikano ,  Daiki Sato ,  Reiki Watanabe ,  Tomoaki Moriya ,  Hokuto Iijima

IPC: H01J1/34 ,  H01J37/073

CPC classification number: H01J1/34 ,  H01J37/073

Abstract: Provided is a photocathode kit that does not require adjustment of the distance between a photocathode film and a lens focusing on the photocathode film when the photocathode and the lens are installed inside an electron gun. The photocathode kit includes: a photocathode including a substrate in which a photocathode film is formed on a first surface; a lens; and a holder that holds the substrate and the lens, and the holder has a retaining member that retains the photocathode film and the lens to be spaced apart by a predetermined distance, and a first communication path that communicates between inside of the holder and outside of the holder.