公开(公告)号：WO2008137951A2

公开(公告)日：2008-11-13

申请号：PCT/US2008/062943

申请日：2008-05-07

Applicant: SURFECT TECHNOLOGIES, INC. ,  XIE, Yixiang ,  ANDERSON, Steven ,  PRIM, Miles A. ,  OBERLITNER, Thomas H. ,  SANCHEZ, Fernando M. ,  MINOGUE, Gerard ,  BASAME, Solomon

Inventor： XIE, Yixiang ,  ANDERSON, Steven ,  PRIM, Miles A. ,  OBERLITNER, Thomas H. ,  SANCHEZ, Fernando M. ,  MINOGUE, Gerard ,  BASAME, Solomon

IPC: C25D17/00 ,  C25D7/12 ,  C25D21/00 ,  C25D21/04 ,  C25D5/00 ,  C25D5/10 ,  H01L21/288

CPC classification number: C25D5/10 ,  C25D5/00 ,  C25D5/003 ,  C25D7/123 ,  C25D17/001 ,  C25D21/00 ,  C25D21/04

Abstract: A plating computer having a plating cell with an interior processing volume configured to contain a plating solution for a plating process, a cell mounting platform connected at least at a first point to an actuator and at a second point to a movable attachment member, a rotatable substrate support member positioned in the processing volume and having a longitudinally extending shaft extending from a non-substrate engaging side of the support member, a transducer coupled to the longitudinally extending shaft and being configured to impart energy to the substrate support member via the shaft, and at least one detachable chemistry module in fluid communication with the processing volume.

Abstract translation: 一种电镀计算机，具有具有内部处理量的电镀单元，所述电镀单元被配置为容纳用于电镀工艺的电镀液，电池安装平台至少连接到致动器的第一点，在第二点处连接到可移动的附接构件， 衬底支撑构件，其定位在处理容积中并且具有从支撑构件的非衬底接合侧延伸的纵向延伸的轴;耦合到纵向延伸的轴并被构造成经由轴向衬底支撑构件施加能量的换能器， 以及至少一个与处理体积流体连通的可拆卸化学模块。

公开(公告)号：WO2008137951A3

公开(公告)日：2009-03-19

申请号：PCT/US2008062943

申请日：2008-05-07

Applicant: SURFECT TECHNOLOGIES INC ,  XIE YIXIANG ,  ANDERSON STEVEN ,  PRIM MILES A ,  OBERLITNER THOMAS H ,  SANCHEZ FERNANDO M ,  MINOGUE GERARD ,  BASAME SOLOMON

Inventor： XIE YIXIANG ,  ANDERSON STEVEN ,  PRIM MILES A ,  OBERLITNER THOMAS H ,  SANCHEZ FERNANDO M ,  MINOGUE GERARD ,  BASAME SOLOMON

IPC: C25D17/00 ,  C25D5/00 ,  C25D5/10 ,  C25D7/12 ,  C25D21/00 ,  C25D21/04 ,  H01L21/288

CPC classification number: C25D5/10 ,  C25D5/00 ,  C25D5/003 ,  C25D7/123 ,  C25D17/001 ,  C25D21/00 ,  C25D21/04

Abstract: A plating computer having a plating cell with an interior processing volume configured to contain a plating solution for a plating process, a cell mounting platform connected at least at a first point to an actuator and at a second point to a movable attachment member, a rotatable substrate support member positioned in the processing volume and having a longitudinally extending shaft extending from a non-substrate engaging side of the support member, a transducer coupled to the longitudinally extending shaft and being configured to impart energy to the substrate support member via the shaft, and at least one detachable chemistry module in fluid communication with the processing volume.

Abstract translation: 一种电镀计算机，具有具有内部处理量的电镀单元，所述电镀单元被配置为容纳用于电镀工艺的电镀液，电池安装平台至少连接到致动器的第一点，在第二点处连接到可移动的附接构件， 衬底支撑构件，其定位在处理容积中并且具有从支撑构件的非衬底接合侧延伸的纵向延伸的轴;耦合到纵向延伸的轴并被构造成经由轴向衬底支撑构件施加能量的换能器， 以及至少一个与处理体积流体连通的可拆卸化学模块。