Abstract:
A method of using coated and/or magnetic particles to deposit structures including solder joints, bumps, vias, bond rings, and the like. The particles may be coated with a solderable material. For solder joints, after reflow the solder material may comprise unmelted particles in a matrix, thereby increasing the strength of the joint and decreasing the pitch of an array of joints. The particle and coating may form a higher melting point alloy, permitting multiple subsequent reflow steps. The particles and/or the coating may be magnetic. External magnetic fields may be applied during deposition to precisely control the particle loading and deposition location. Elements with incompatible electropotentials may thereby be electrodeposited in a single step. Using such fields permits the fill of high aspect ratio structures such as vias without requiring complete seed metallization of the structure. Also, a catalyst consisting of a magnetic particle coated with a catalytic material, optionally including an intermediate layer.
Abstract:
A method of using coated and/or magnetic particles to deposit structures including solder joints, bumps, vias, bond rings, and the like. The particles may be coated with a solderable material. For solder joints, after reflow the solder material may comprise unmelted particles in a matrix, thereby increasing the strength of the joint and decreasing the pitch of an array of joints. The particle and coating may form a higher melting point alloy, permitting multiple subsequent reflow steps. The particles and/or the coating may be magnetic. External magnetic fields may be applied during deposition to precisely control the particle loading and deposition location. Elements with incompatible electropotentials may thereby be electrodeposited in a single step. Using such fields permits the fill of high aspect ratio structures such as vias without requiring complete seed metallization of the structure. Also, a catalyst consisting of a magnetic particle coated with a catalytic material, optionally including an intermediate layer.
Abstract:
A method of producing metal hydride misch-metal composite powders comprising providing to a rotary flow-through electrodeposition apparatus a powder whose particles comprise one or more lanthanide alloy metals selected from the group consisting of titanium lanthanide alloy metals and nickel lanthanide alloy metals; and electrodepositing one or more non-lanthanide metals on the powder via the apparatus. Also the resulting compositions of matter and metal hydride misch-metal powders.
Abstract:
A method of using coated and/or magnetic particles to deposit structures including solder joints, bumps, vias, bond rings, and the like. The particles may be coated with a solderable material. For solder joints, after reflow the solder material may comprise unmelted particles in a matrix, thereby increasing the strength of the joint and decreasing the pitch of an array of joints. The particle and coating may form a higher melting point alloy, permitting multiple subsequent reflow steps. The particles and/or the coating may be magnetic. External magnetic fields may be applied during deposition to precisely control the particle loading and deposition location. Elements with incompatible electropotentials may thereby be electrodeposited in a single step. Using such fields permits the fill of high aspect ratio structures such as vias without requiring complete seed metallization of the structure. Also, a catalyst consisting of a magnetic particle coated with a catalytic material, optionally including an intermediate layer.
Abstract:
An apparatus and method for highly controlled electrodeposition, particularly useful for electroplating submicron structures. Enhanced control of the process provides for a more uniform deposit thickness over the entire substrate, and permits reliable plating of submicron features. The apparatus includes a pressurized electrochemical cell to improve plating efficiency and reduce defects, vertical laminar flow of the electrolyte solution to remove surface gases from the vertically arranged substrate, a rotating wafer chuck to eliminate edge plating effects, and a variable aperture to control the current distribution and ensure deposit uniformity across the entire substrate. Also a dynamic profile anode whose shape can be varied to optimize the current distribution to the substrate. The anode is advantageously able to use metallic ion sources and may be placed close to the cathode thus minimizing contamination of the substrate.
Abstract in simplified Chinese:一电镀计算器具有一电镀槽,该电镀槽具有一被组构成容纳电镀制程用之电镀溶液的内部处理容积;一电镀槽安装平台,其至少在第一点连接至一作动器及在第一点连接至一可运动附接构件;一可旋转之基板支撑构件,其定位在该处理容积中,且具有一纵向延伸轴杆,该轴杆由该支撑构件的一非基板啮合侧面延伸;一传感器,其耦接至该纵向延伸轴杆,且被组构成经由该轴杆赋予能量至该基板支撑构件;及至少一可拆卸化学模块,其与该处理容积流体相通。
Abstract in simplified Chinese:一种其形状可变化以于高度控制电沉积期间最优化至一基板之电流分布之一动态轮廓阳极。该制成之增大控制为整个基板之更统一沉积厚度做准备,并允许次微米特征之可靠电镀。该阳极尤其有用于电镀次微米结构。该阳极可有利地使用金属离子来源,且可放置靠近于该阴极,因此使该基板之污染缩到最小。该阳极轮廓可于该沉基制程期间变化。该阳极可由多个同心区域组成,其各可以独立电压与电流操作。
Abstract:
An apparatus and method for coating or treating powdered material, particularly ultrafine powders in the nanometer or submicron range of mean diameters, by electrolytic processes. A platen (30) is mounted for rotation upon a fixed shaft (20), and a rotary flow-through electrolytic cell (36) is mounted upon a platen (30) for rotation thereon, the cell's axis of rotation (B) being offset from the platen's axis of rotation (A). The cells axis of rotation (B) revolves around the platen's axis (A) as the platen (30) rotates. The electrolytic cell (36) accordingly undergoes a planetary rotation, as the cell (36) revolves around the platen's axis of rotation (A). The planetary rotation of the cell (B) allows the powdered material to be collected by centrifugal force and constantly agitated to promote uniform electroplating. An electrode array (44) and rolling contact system are supplied which allow electric potential to be applied only to those electrodes actually in contact with the powdered material to be treated.