Abstract:
PROBLEM TO BE SOLVED: To provide a display device capable of preventing shutter plates and springs from being stuck on a wiring pattern on a substrate.SOLUTION: A MEMS shutter 202 is formed on a TFT substrate 101e by means of photolithography and dry etching and includes a shutter plate 210, a first spring 222, and a first anchor 240 as constituents. Wiring 243 is formed with a metallic film on a surface of the TFT substrate 101e. An insulating film 244 is formed on portions of the wiring 243 surface that overlaps the shutter plate 210 and the first spring 222.
Abstract:
PROBLEM TO BE SOLVED: To provide a display device with improved light transmittance through light transmitting apertures while maintaining high reflectance of a reflective layer.SOLUTION: A reflective layer formed on an element substrate for making efficient use of light from a light source comprises a metallic film and a reflection enhancing film. In each aperture for passing the light from the light source, the metallic film is removed while a silicon nitride film, which is a part of the reflection enhancing film, remains. Thickness of the silicon nitride film shall be a quarter of an incident light wavelength in the reflection enhancing film, and shall be half an incident light wavelength in the apertures. In order to realize such configuration, the silicon nitride film, which is a part of the reflection enhancing film, and a passivation film provided above an interlayer insulating film are laminated together in the apertures.
Abstract:
PROBLEM TO BE SOLVED: To prevent stiction in a display device with MEMS shutters.SOLUTION: A display device includes a plurality of pixels arranged in a matrix form on a first substrate, each pixel having a switching element and a MEMS shutter driven by the switching element. The display device includes anti-stiction coating which is formed by mutually condensing compounds represented by a formula (I) and chemically binding the same with at least a portion of the MEMS shutter surface. (In the formula (I), Rrepresents a monovalent organic group, Xrepresents a hydrolyzable group, and Xrepresents a monovalent organic group or a hydrolyzable group).
Abstract:
PROBLEM TO BE SOLVED: To provide methods for reducing the effects of stiction and improving the optical and electromechanical performance of the display apparatus.SOLUTION: This invention relates to MEMS display apparatus and methods for assembly thereof that include a plurality of light modulators having components substantially surrounded in a liquid 530 that reduces the effects of stiction and improves the optical and electromechanical performance of the display apparatus. The invention also relates to methods for aligning components of a MEMS display to establish a correspondence between a plurality of light modulators 503 and a plurality of apertures to regulate the transmission of light through the apparatus.
Abstract:
PROBLEM TO BE SOLVED: To provide a low power display with improved luminous efficiency.SOLUTION: Disclosed is an improved device and method for spatial light modulation which uses an optical cavity with both of front and rear reflective surfaces. In order to spatially modulate light, a light transmission area is formed in the front reflective surface. The display device comprises: a substrate having a front surface facing an intended viewer and a rear surface facing a light source; a dielectric material layer disposed on the front surface of the substrate; a metal layer including a plurality of apertures and disposed on the dielectric material layer; and a plurality of light modulation shutter assemblies 102 disposed on the metal layer. The plurality of apertures permits light from the light source to pass through the metal layer for modulation by the plurality of light modulation shutter assemblies 102.
Abstract:
PROBLEM TO BE SOLVED: To provide a mechanically operable display which includes a bi-stable mechanism and which can be driven at low voltage for reduced power consumption.SOLUTION: This invention relates to MEMS-based display device. In particular, the display device may include an actuator having two mechanically compliant electrodes. In addition, a bi-stable shutter assembly included in the display device and means for supporting a shutter in the shutter assembly are disclosed.
Abstract:
PROBLEM TO BE SOLVED: To provide a method of operating a display.SOLUTION: Provided is a method of operating a display including: loading image data to pixels in multiple rows of pixels in an array of pixels during a data loading phase, actuating the pixels in the multiple rows during an update phase, and illuminating at least one lamp during a lamp illumination phase to illuminate the actuated pixels to form an image on the display, in which the update phase partially overlaps in time with at least one of the loading phase and the illumination phase.
Abstract:
PROBLEM TO BE SOLVED: To provide direct-view displays built on transparent substrates that can be driven at high speeds and at low voltages.SOLUTION: An embodiment comprises: an array of light blocking elements having at least two positions; at least one light source; a controller for controlling the positions of the light blocking elements, controlling illumination of the at least one light source, obtaining from a memory a plurality of sub-frame data sets corresponding to an image frame, processing the sub-frame data sets according to an output sequence to move the light blocking elements to the positions indicated in the sub-frame data sets, and driving the at least one light source to form an image according to the sub-frame data sets; and a sequence parameter calculation module for determining changes to the output sequence to alter the image.
Abstract:
PROBLEM TO BE SOLVED: To provide direct-view displays that can be driven at low voltages for improved image quality and reduced power consumption.SOLUTION: A direct-view display 700 comprises: an array 702 of MEMS light modulators; a control matrix; and a controller 704 for controlling states of each of the light modulators in the array. The control matrixes 710, 708 transmit data and actuation voltages to the array. The controller includes a processor, a memory, and an output, and receives image data encoding an image frame for display. The processor derives a plurality of sub-frame data sets from the image data, where each of the sub-frame data sets indicates desired states of light modulators in multiple rows and multiple columns of the array. The memory stores the plurality of sub-frame data sets. The output outputs the plurality of sub-frame data sets according to an output sequence to drive light modulators into the states indicated in the sub-frame data sets.
Abstract:
PROBLEM TO BE SOLVED: To provide a mechanically operable display device that can be driven fast at a low voltage for improved image quality and reduced power consumption.SOLUTION: Images are formed on a display device 100 using control matrices (including write-in-permission interconnection 110, data interconnection 112, and common interconnection 114) for controlling the movement of MEMS-based light modulators (shutter assemblies 102a to 102d).