IMPLANTATION MASK FOR HIGH ENERGY ION IMPLANTATION
    1.
    发明申请
    IMPLANTATION MASK FOR HIGH ENERGY ION IMPLANTATION 审中-公开
    注入掩模高能离子注入

    公开(公告)号:WO2001061735A2

    公开(公告)日:2001-08-23

    申请号:PCT/DE2001000596

    申请日:2001-02-15

    CPC classification number: H01L29/0634 H01L21/266

    Abstract: The invention relates to a re-usable implantation mask (5), preferably made of silicon, comprising specially structured trenches and holes(2 or 3), which is provided directly or at a distance from a device wafer (7). The invention also relates to a method for adjusting a further processing plane on an implantation plane in a semiconductor wafer (7) fitted with one such implementation mask.

    Abstract translation: 本发明涉及一种可重复使用的注入掩模(5)配有特定图案的沟槽和孔制成优选硅(2或3),其直接或在器件晶片(7),以及用于在注入电平调整一个进一步的处理面的方法的距离设置 一个具有这样的注入掩模的半导体晶片(7)处理。

    ELECTRO-MOTOR DRIVE, IN PARTICULAR FAN DRIVE
    2.
    发明申请
    ELECTRO-MOTOR DRIVE, IN PARTICULAR FAN DRIVE 审中-公开
    电动驱动器,尤其是鼓风机驱动器

    公开(公告)号:WO2010075844A3

    公开(公告)日:2010-08-19

    申请号:PCT/DE2009001777

    申请日:2009-12-16

    CPC classification number: H02K5/24 Y10S277/916

    Abstract: In an electro-motor drive, in particular for a fan drive of a motor vehicle, comprising a commutator motor (1), the motor shaft (4) of which is rotatably mounted on axially opposing sides (BS, AS) in shaft bearings (9, 10) covered by means of a bearing shield (7, 8), a damping system (14) is arranged on the bearing side of the or each shaft bearing (9, 10) facing away from the bearing shield (7, 8) in order to dampen the sound, in particular of bearing play-related contact noise and vibration or humming noise.

    Abstract translation: 在电动马达的驱动,在机动车辆中的特定的风扇驱动器,具有一个换向器马达(1),其马达轴(4)上在每种情况下轴向相对侧(BS,AS)通过一个支承板的装置(7,8)所覆盖轴轴承(9,10)可旋转地 被安装时,为声音衰减,特别是轴承间隙引起在支承板冲击噪音和振动或啸声(7,8)的面向远离轴承的侧部或每个轴承(9,10),其布置的阻尼系统(14)。

    IMPLANTATION MASK FOR HIGH ENERGY ION IMPLANTATION
    3.
    发明申请
    IMPLANTATION MASK FOR HIGH ENERGY ION IMPLANTATION 审中-公开
    注入掩模高能离子注入

    公开(公告)号:WO0161735A3

    公开(公告)日:2002-07-18

    申请号:PCT/DE0100596

    申请日:2001-02-15

    CPC classification number: H01L29/0634 H01L21/266

    Abstract: The invention relates to a re-usable implantation mask (5), preferably made of silicon, comprising specially structured trenches and holes(2 or 3), which is provided directly or at a distance from a device wafer (7). The invention also relates to a method for adjusting a further processing plane on an implantation plane in a semiconductor wafer (7) fitted with one such implementation mask.

    Abstract translation: 本发明涉及一种可重复使用的注入掩模(5)配有特定图案的沟槽和孔制成优选硅(2或3),其直接或在器件晶片(7),以及用于在注入电平调整一个进一步的处理面的方法的距离设置 一个具有这样的注入掩模的半导体晶片(7)处理。

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