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公开(公告)号：US07561279B2
公开(公告)日：2009-07-14
申请号：US11770582
申请日：2007-06-28
Applicant: Raymond Castonguay , Piotr Szwaykowski
Inventor： Raymond Castonguay , Piotr Szwaykowski
IPC: G01B9/02
CPC classification number: G01B9/02081 , G01B2290/45 , G01B2290/70 , G01J9/02 , G01J2009/0234 , G01J2009/0261
Abstract: An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.
Abstract translation: 一种光学测量装置，包括组合的偏振型干涉仪，其包括偏振光束分离器，其中偏振光束被分成垂直偏振的参考和测试光束，一组检测器布置成一行，用于创建多个 相移干涉图，以及用于沿与检测器的长轴垂直的方向移动物体的扫描装置。
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2.发明申请Interferometric system with reduced vibration sensitivity and realated method 有权具有降低振动灵敏度和实现方法的干涉测量系统公开(公告)号：US20060146341A1
公开(公告)日：2006-07-06
申请号：US10536576
申请日：2003-11-26
Applicant: Piotr Szwaykowski , Federick Bushroe , Raymond Castonguay
Inventor： Piotr Szwaykowski , Federick Bushroe , Raymond Castonguay
IPC: G01B9/02
CPC classification number: G01B9/02072 , G01B9/02057 , G01B9/02081 , G01B2290/70
Abstract: A source module (12) generates mutually orthogonally polarized beams of light as emanating from two spatially separated point sources (Sv, Sw) for use in a phase shifting interferometer.
Abstract translation: 源模块（12）产生相互垂直偏振的光束，其从两个空间分离的点源（Sv，Sw）发出，用于相移干涉仪。
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公开(公告)号：US20060146340A1
公开(公告)日：2006-07-06
申请号：US10536378
申请日：2003-11-26
Applicant: Piotr Szwaykowski , Raymond Castonguay , Frederick Bushroe
Inventor： Piotr Szwaykowski , Raymond Castonguay , Frederick Bushroe
IPC: G01B9/02
CPC classification number: G01B9/02081 , G01B2290/45 , G01B2290/70
Abstract: A back-end assembly for use with a front-end assembly in acquiring phase-shifted interferograms having a plurality of imaging modules (Ma, Mb, Mc). Each module (Ma, Mb, Mc) has a quarter wave plate (30a, 30b, 30c), a polarizer (32a, 32b, 32c), and an image sensor (34a, 34b, 34c) so that each polarizer has a different rotation orientation thus acquiring phase-shifted interferograms.
Abstract translation: 一种用于前端组件的后端组件，用于获取具有多个成像模块（Ma，Mb，Mc）的相移干涉图。 每个模块（Ma，Mb，Mc）具有四分之一波片（30a，30b，30c），偏振器（32a，32b，32c）和图像传感器（34a，34b，34b） c）使得每个偏振器具有不同的旋转取向，从而获得相移干涉图。
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公开(公告)号：US20080043224A1
公开(公告)日：2008-02-21
申请号：US11770582
申请日：2007-06-28
Applicant: Raymond Castonguay , Piotr Szwaykowski
Inventor： Raymond Castonguay , Piotr Szwaykowski
IPC: G01N21/00
CPC classification number: G01B9/02081 , G01B2290/45 , G01B2290/70 , G01J9/02 , G01J2009/0234 , G01J2009/0261
Abstract: An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.
Abstract translation: 一种光学测量装置，其组合包括偏振型干涉仪，该偏振型干涉仪包括偏振光束分离器，其中偏振光束被分成正交偏振的参考和测试光束，检测器阵列布置成一行，用于创建多个 相移干涉图，以及用于沿与检测器的长轴垂直的方向移动物体的扫描装置。
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