公开(公告)号：CA2586864A1

公开(公告)日：2006-05-18

申请号：CA2586864

申请日：2005-11-14

Applicant: IBM ,  ST JEAN PHOTOCHIMIE INC

Inventor： KHOJASTEH MAHMOUD ,  VARANASI PUSHKARA RAO ,  FEGHALI KHALIL ,  MOTALLEBI SHAHROKH ,  BOUCHARD LUC ,  MARCOTTE IAN ,  DESILETS DENIS

IPC: C07C69/74 ,  G03F7/20 ,  H01L21/308

公开(公告)号：WO2006050609A1

公开(公告)日：2006-05-18

申请号：PCT/CA2005/001728

申请日：2005-11-14

Applicant: ST-JEAN PHOTOCHIMIE INC. ,  INTERNATIONAL BUSINESS MACHINES CORPORATION (IBM) ,  MOTALLEBI, Shahrokh ,  DÉSILETS, Denis ,  MARCOTTE, Ian ,  BOUCHARD, Luc ,  FEGHALI, Khalil ,  VARANASI, Pushkara Rao ,  KHOJASTEH, Mahmoud

Inventor： MOTALLEBI, Shahrokh ,  DÉSILETS, Denis ,  MARCOTTE, Ian ,  BOUCHARD, Luc ,  FEGHALI, Khalil ,  VARANASI, Pushkara Rao ,  KHOJASTEH, Mahmoud

IPC: C07C69/74 ,  G03F7/20 ,  H01L21/308

CPC classification number: G03F7/0046 ,  C07C69/757 ,  C07C2602/42 ,  G03F7/0397

Abstract: The present invention relates to compounds of formula (I): wherein R 1 is H, or a C 1 -C 10 linear, branched or cyclic alkyl group which is unsubstituted or substituted with fluorine; R 2 is an alicyclic group having 5 to 20 carbon atoms which is unsubstituted or substituted with fluorine; and R 3 represents a C 1 -C 10 linear or branched alkylène which is unsubstituted or substituted with fluorine. Processes for preparing such compounds are also disclosed. The compounds of the present invention can be used as monomers in the fields of photolithography and semiconductor fabrication.

Abstract translation: 本发明涉及式（I）的化合物：其中R 1是H或C 1 -C 10直链，支链或 未取代或被氟取代的环状烷基; R 2是未被取代或被氟取代的碳原子数5〜20的脂环族基团; R 3表示未被取代或被氟取代的C 1 -C 10直链或支链烷基。 还公开了制备这些化合物的方法。 本发明的化合物可以用作光刻和半导体制造领域中的单体。

公开(公告)号：WO2006039810A1

公开(公告)日：2006-04-20

申请号：PCT/CA2005/001583

申请日：2005-10-13

Applicant: ST-JEAN PHOTOCHIMIE INC. ,  MOTALLEBI, Shahrokh ,  DÉSILETS, Denis

Inventor： MOTALLEBI, Shahrokh ,  DÉSILETS, Denis

IPC: G03F7/022

CPC classification number: G03F7/0226

Abstract: The present invention relates to photoactive compositions comprising about 20 to about 80 mol % of trihydroxybenzophenone having at least 70 % of the hydroxyl groups converted into 2,1,5-diazonaphthoquinone sulfonic acid esters. The compositions also comprise about 80 to about 20 mol % of a mixture comprising a backbone molecule, and/or the backbone molecule having hydroxyl groups partially and/or completely converted into 2,1,5-diazonaphthoquinone sulfonic acid esters. Processes for preparing such compositions are also disclosed.

Abstract translation: 本发明涉及包含约20至约80mol％的具有至少70％的羟基转化为2,1,5-重氮萘醌磺酸酯的三羟基二苯甲酮的光活性组合物。 组合物还包含约80至约20mol％的包含主链分子的混合物和/或具有部分和/或完全转化为2,1,5-重氮萘醌磺酸酯的羟基的主链分子。 还公开了制备这种组合物的方法。