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公开(公告)号：CA2586864A1
公开(公告)日：2006-05-18
申请号：CA2586864
申请日：2005-11-14
Applicant: IBM , ST JEAN PHOTOCHIMIE INC
Inventor： KHOJASTEH MAHMOUD , VARANASI PUSHKARA RAO , FEGHALI KHALIL , MOTALLEBI SHAHROKH , BOUCHARD LUC , MARCOTTE IAN , DESILETS DENIS
IPC: C07C69/74 , G03F7/20 , H01L21/308
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