Abstract:
High pressure fuel pump includes a cylinder which is fitted in a concave portion formed in a pump housing and which defines a compression chamber of the pump and a plunger which pressurizes, by sliding against the cylinder, the fluid in the compression chamber. It is structured such that the fluid sucked into the compression chamber by reciprocating motion of the plunger is pressurized and is then discharged from the compression chamber. The cylinder is formed of a cylindrical member which has a ceiling portion and in which the compression chamber is partitionedly formed. A fuel suction path formed in the pump housing reaches the compression chamber through the cylinder and a fuel discharge path formed in the pump housing is connected to the compression chamber through the cylinder. The cylinder is pressed against the pump body by a fuel pressurizing force applied to the cylinder.
Abstract:
In a high pressure fuel supply pump for transmitting rotation of a cam to a reciprocating plunger via a tappet and a retainer, a diametric force acting on the plunger is reduced. The pump includes the retainer disposed on the plunger and a return spring exerting an urging force on the retainer in a direction of the tappet. A clearance between a plunger leading end and a tappet bottom surface opposed thereto is set to be greater than a clearance between a retainer bottom surface and the tappet bottom surface opposed thereto, and a clearance between a retainer inside diameter section and a plunger peripheral surface section opposed thereto is set to be greater than a clearance between a retainer outside diameter section and a tappet inner wall opposed thereto.
Abstract:
A method of correcting a mask pattern for manufacturing a semiconductor device is disclosed. The method includes extracting a corner portion of a transistor portion. A distance from the corner portion to a line portion is extracted. A distance where the line portion does not overlap a rounding of the corner portion generated after a wafer process is obtained. A correction rule is made for a correction whether the corner portion is notched or not from the obtained distance. A corresponding relationship between the distance and an intersection part is obtained and a correction is made based on the correction rule to the corner portion.
Abstract:
A high pressure fuel pump for an internal combustion engine having a cylinder, a plunger slidably fitted in the cylinder and a seal mechanism for blocking fuel leakage from an end of a sliding portion between the cylinder and the plunger and also for preventing an lubricant for a driving mechanism of the plunger from entering into the cylinder from the end of the sliding portion of the cylinder and the plunger. A holder surrounding the end of the sliding portion of the cylinder and the plunger is provided. The seal mechanism comprises two mutually independent seal devices mounted with a specific spacing in a longitudinal direction from the end of the sliding portion of the cylinder and the plunger along a circumference of the plunger. The two seal devices are held on the circumference of the plunger by the holder surrounding the end of the sliding portion of the cylinder and the plunger while keeping the specific spacing.
Abstract:
A mechanism for reducing pressure pulsation includes a pair of metal dampers formed by joining two disk-shaped metal diaphragms over an entire circumference and forming a hermetically sealed space inside a joined portion, with gas being sealed in the aforementioned hermetically sealed space of the damper, has a pair of pressing members which give pressing forces to both outer surfaces of the aforementioned metal dampers at a position at an inner diameter side from the joined portion, and is unitized with the pair of pressing members being connected in a state in which they sandwich the metal damper.
Abstract:
A controlling apparatus of a variable capacity type fuel pump, for preventing noises caused due to drive of the fuel pump and noises caused due to drive of injectors from overlapping or duplicating each other in the timing thereof, wherein signals for driving the pump are reduced, or the timing thereof is shifted forward/backward, within a specific timing where the overlapping can be expected, or a specific timing where they are determined to overlap or duplicate with each other.
Abstract:
The objective of the present invention is to dampen operating sounds of an electromagnetic drive mechanism used for a variable displacement to reduce an individual difference depending on apparatus due to the control mechanism in a high-pressure fuel supply pump change over time or installation tolerance.To achieve the above objective, the present invention is configured such that before the electromagnetic drive mechanism supplies a drive force to a plunger which is electromagnetically driven by the electromagnetic drive mechanism, another displacement force situates the plunger in a specific position. When compared to an occasion where the plunger is displaced all strokes by a magnetic biasing force, the above configuration is able to reduce the force of impact on a member (for example, valve body) mounted to the plunger and a restricting member, thereby damping the collision noise. Furthermore, since an extra member, such as a damping member, is not required, individual difference depending on apparatus do not easily occur.
Abstract:
A method of generating an inspection data used for inspecting an inspection-object pattern on a substrate, the inspection-object pattern formed by transferring a first mask pattern formed on a first mask and a second mask pattern formed on a second mask onto one layer on the substrate, a part of a first transferred pattern of the first mask pattern and a part of a second transferred pattern of the second mask pattern being overlapped on the layer. The method performs a corner process on each corner of a first design data of the first mask pattern and each corner of a second design data of the second mask pattern and generates an inspection data by performing a logical operation using the corner-processed first design data and the corner processed second design data.
Abstract:
According to an aspect of the invention, there is provided a calibration method of performing contrast threshold calibration in extracting a pattern edge from an image of a pattern formed on a processing target substrate, including simulating formation of the pattern to detect a portion predicted to have shorted or opened in the pattern, calculating a contrast of an image of the pattern including the portion predicted to have shorted or opened, and determining a threshold from the contrast, the threshold avoiding extraction of a pattern edge in the portion predicted to have shorted or opened.
Abstract:
A pattern correcting method of a mask for manufacturing a semiconductor device includes extracting a correction portion to be corrected from a mask pattern on the mask, obtaining a surrounding environment of the correction portion and giving a correction amount to the correction portion. The correction amount is variable. The variable correction amount is given to the correction portion in accordance with the surrounding environment of the correction portion.