公开(公告)号：WO2016179596A1

公开(公告)日：2016-11-10

申请号：PCT/US2016/031509

申请日：2016-05-09

Applicant: TEXAS INSTRUMENTS INCOPORATED ,  TEXAS INSTRUMENTS JAPAN LIMITED

Inventor： DELLAS, Nicholas, Stephen

IPC: H01L21/318 ,  C23C16/34 ,  H05K3/02

CPC classification number: H01L29/408 ,  B81B3/0072 ,  B81B2203/0118 ,  B81C1/00666 ,  B81C2201/0167 ,  H01L21/0217 ,  H01L21/02211 ,  H01L21/02271 ,  H01L21/3245 ,  H01L21/823864 ,  H01L23/291 ,  H01L29/2003 ,  H01L29/205 ,  H01L29/402 ,  H01L29/665 ,  H01L29/6659 ,  H01L29/778 ,  H01L29/7787

Abstract: In described examples, a microelectronic device (102) contains a high performance silicon nitride layer, which is stoichiometric within 2 atomic percent, has a low stress of 600 MPa to 1000 MPa, and has a low hydrogen content, less than 5 atomic percent, formed by an LPCVD process. The LPCVD process uses ammonia NH3 and dichlorosilane DCS gases in a ratio of 4 to 6, at a pressure of 150 millitorr to 250 millitorr, and at a temperature of 800°C to 820°C.

Abstract translation: 在所述实施例中，微电子器件（102）包含化学计量在2原子％以内的高性能氮化硅层，具有600MPa〜1000MPa的低应力，低于5原子％的氢含量， 由LPCVD过程形成。 LPCVD方法使用氨的NH 3和二氯硅烷DCS气体，其比例为4至6，压力为150毫托，250毫托，温度为800℃至820℃。

公开(公告)号：US20160174192A1

公开(公告)日：2016-06-16

申请号：US14816512

申请日：2015-08-03

Applicant: TEXAS INSTRUMENTS INCOPORATED

Inventor： ARVIND K. RAGHU ,  ARITON E. XHAFA ,  RAMANUJA VEDANTHAM ,  XIAOLIN LU

IPC: H04W72/00 ,  H04W72/12

CPC classification number: H04W72/1289 ,  H04W72/1273 ,  Y02D70/00

Abstract: A network includes a parent node and at least one child node that is configured to communicate with the parent node via a wireless network protocol. The parent node includes a broadcast coordinator to transmit a broadcast message from the parent node to the child node at predetermined time intervals according to the wireless network protocol. A scheduler generates a scheduling packet that is communicated in the broadcast message. The scheduling packet includes a data field to instruct each child node to activate and receive data communicated from the parent node in a prescribed time slot following the broadcast message that is defined by the scheduling packet.

Abstract translation: 网络包括父节点和被配置为经由无线网络协议与父节点进行通信的至少一个子节点。 父节点包括广播协调器，以根据无线网络协议以预定的时间间隔从父节点发送广播消息到子节点。 调度器生成在广播消息中传送的调度分组。 调度分组包括数据字段，用于指示每个子节点在由调度分组定义的广播消息之后的规定时隙中激活和接收从父节点传送的数据。

公开(公告)号：US10117267B2

公开(公告)日：2018-10-30

申请号：US14816512

申请日：2015-08-03

Applicant: TEXAS INSTRUMENTS INCOPORATED

Inventor： Arvind K. Raghu ,  Ariton E. Xhafa ,  Ramanuja Vedantham ,  Xiaolin Lu

IPC: H04W72/12

Abstract: A network includes a parent node and at least one child node that is configured to communicate with the parent node via a wireless network protocol. The parent node includes a broadcast coordinator to transmit a broadcast message from the parent node to the child node at predetermined time intervals according to the wireless network protocol. A scheduler generates a scheduling packet that is communicated in the broadcast message. The scheduling packet includes a data field to instruct each child node to activate and receive data communicated from the parent node in a prescribed time slot following the broadcast message that is defined by the scheduling packet.