公开(公告)号：WO2012015301A2

公开(公告)日：2012-02-02

申请号：PCT/NL2011050539

申请日：2011-07-22

Applicant: UNIV DELFT TECH ,  STICHTING TECH WETENSCHAPP ,  TOLOU NIMA ,  HERDER JUSTUS

Inventor： TOLOU NIMA ,  HERDER JUSTUS

IPC: B81B3/00

CPC classification number: B81B3/0037 ,  B81B2203/051

Abstract: Micro-electromechanical system (MEMS) comprising a substrate or substrate parts, and a compliant first segment or segments within the substrate or substrate parts with a predefined positive stiffness, wherein the first segment or segments is or are statically balanced. This is embodied by applying a second segment or segments within the substrate or substrate parts that provide a balancing force to the first segment or segments so as to counteract at least in a predefined working range of the first segment or segments the said predefined positive stiffness.

Abstract translation: 微机电系统（MEMS）包括衬底或衬底部件以及具有预定正刚度的衬底或衬底部件内的顺应性第一段或段，其中第一段或段是静态平衡的。 这是通过在衬底或衬底部件内施加第二段或段来实现的，其向第一段或段提供平衡力，以便至少在第一段的预定义工作范围内抵消或将所述预定正刚度分段。

公开(公告)号：WO2012015301A3

公开(公告)日：2012-02-02

申请号：PCT/NL2011/050539

申请日：2011-07-22

Applicant: TECHNISCHE UNIVERSITEIT DELFT ,  STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN ,  TOLOU, Nima ,  HERDER, Justus

Inventor： TOLOU, Nima ,  HERDER, Justus

IPC: B81B3/00

Abstract: Micro-electromechanical system (MEMS) comprising a substrate or substrate parts, and a compliant first segment or segments within the substrate or substrate parts with a predefined positive stiffness, wherein the first segment or segments is or are statically balanced. This is embodied by applying a second segment or segments within the substrate or substrate parts that provide a balancing force to the first segment or segments so as to counteract at least in a predefined working range of the first segment or segments the said predefined positive stiffness.