公开(公告)号：WO2010129690A8

公开(公告)日：2012-06-21

申请号：PCT/US2010033750

申请日：2010-05-05

Applicant: BROOKS AUTOMATION INC ,  BRUCKER GERARDO A ,  VAN ANTWERP KENNETH D ,  RATHBONE G JEFFERY ,  HEINBUCH SCOTT C ,  SCHOTT MICHAEL N

Inventor： BRUCKER GERARDO A ,  VAN ANTWERP KENNETH D ,  RATHBONE G JEFFERY ,  HEINBUCH SCOTT C ,  SCHOTT MICHAEL N

IPC: H01J49/42 ,  G01N27/62 ,  H01J49/26

CPC classification number: H01J49/4245 ,  H01J49/0063 ,  H01J49/429

Abstract: An ion trap includes an electrode structure, including a first and a second opposed mirror electrodes and a central lens therebetween, that produces an electrostatic potential in which ions are confined to trajectories at natural oscillation frequencies, the confining potential being anharmonic. The ion trap also includes an AC excitation source having an excitation frequency f that excites confined ions at a frequency of about twice the natural oscillation frequency of the ions, the AC excitation frequency source preferably being connected to the central lens. In one embodiment, the ion trap includes a scan control that mass selectively reduces a frequency difference between the AC excitation frequency and about twice the natural oscillation frequency of the ions.

Abstract translation: 离子阱包括电极结构，其包括第一和第二相对的镜电极和它们之间的中心透镜，其产生静电电位，其中离子以固有的振荡频率被限制在轨迹上，限制电位是非调谐的。 离子阱还包括具有激发频率f的AC激发源，激发频率f以约离子的固有振荡频率的大约两倍的频率激发约束离子，AC激发频率源优选地连接到中心透镜。 在一个实施例中，离子阱包括扫描控制，质量选择性地降低AC激发频率与离子的固有振荡频率的大约两倍之间的频率差。

公开(公告)号：WO2010129690A3

公开(公告)日：2010-11-11

申请号：PCT/US2010/033750

申请日：2010-05-05

Applicant: BROOK AUTOMATION, INC. ,  BRUCKER, Gerardo, A. ,  VAN ANTWERP, Kenneth, D. ,  RATHBONE, G., Jeffery ,  HEINBUCH, Scott, C. ,  SCHOTT, Michael, N.

Inventor： BRUCKER, Gerardo, A. ,  VAN ANTWERP, Kenneth, D. ,  RATHBONE, G., Jeffery ,  HEINBUCH, Scott, C. ,  SCHOTT, Michael, N.

IPC: H01J49/42 ,  H01J49/26 ,  G01N27/62

Abstract: An ion trap includes an electrode structure, including a first and a second opposed mirror electrodes and a central lens therebetween, that produces an electrostatic potential in which ions are confined to trajectories at natural oscillation frequencies, the confining potential being anharmonic. The ion trap also includes an AC excitation source having an excitation frequency f that excites confined ions at a frequency of about twice the natural oscillation frequency of the ions, the AC excitation frequency source preferably being connected to the central lens. In one embodiment, the ion trap includes a scan control that mass selectively reduces a frequency difference between the AC excitation frequency and about twice the natural oscillation frequency of the ions.

Abstract translation: 离子阱包括电极结构，该电极结构包括第一和第二相对的镜电极以及其间的中心透镜，其产生静电势，其中离子被限制在自然振荡频率处的轨迹处， 潜在的不和谐。 该离子阱还包括具有激励频率f f的AC激励源，激励频率约为离子自然振荡频率的两倍，AC激励频率源优选连接到中心 镜片。 在一个实施例中，离子阱包括扫描控制，该质量选择性地减小AC激励频率和大约两倍离子的固有振荡频率之间的频率差。

公开(公告)号：WO2010033427A1

公开(公告)日：2010-03-25

申请号：PCT/US2009/056612

申请日：2009-09-11

Applicant: BROOKS AUTOMATION, INC. ,  CARMICHAEL, Larry, K. ,  WEBER, Jesse, A. ,  HENRY, John, H. ,  SCHOTT, Michael, N. ,  BRUCKER, Gerardo, A. ,  VAN ANTWERP, Kenneth, D.

Inventor： CARMICHAEL, Larry, K. ,  WEBER, Jesse, A. ,  HENRY, John, H. ,  SCHOTT, Michael, N. ,  BRUCKER, Gerardo, A. ,  VAN ANTWERP, Kenneth, D.

IPC: G01L21/30

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01N27/60 ,  G01N27/62 ,  H01J41/02

Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.

Abstract translation: 测量压力的电离计具有发射电子的电子源和限定电离空间的阳极。 该量规还包括收集电极以收集由电子和气体之间的冲击形成的离子，并且基于收集的离子来测量压力。 电子源在取决于压力的多个排放水平和除压力之外的第二参数的发射电流之间动态变化。 电离计还可以根据存储在非易失性存储器中并由用户选择的参数来改变量规组件的各种操作参数。

公开(公告)号：WO2011057201A3

公开(公告)日：2011-08-18

申请号：PCT/US2010055852

申请日：2010-11-08

Applicant: BROOKS AUTOMATION INC ,  BRUCKER GERARDO A ,  VAN ANTWERP KENNETH D JR

Inventor： BRUCKER GERARDO A ,  VAN ANTWERP KENNETH D JR

IPC: G01L21/00 ,  G01J3/28 ,  G01N21/25 ,  H01L21/66

CPC classification number: G01M3/226 ,  G01M3/205 ,  G01M3/229 ,  G01M3/34

Abstract: A gas analyzer for a vacuum chamber includes processing electronics configured to receive mass spectral data, receive input of total pressure in the vacuum chamber, receive external input from at least one sensor, and employ the mass spectral data, the total pressure in the vacuum chamber, and the external input from the at least one sensor to calculate a vacuum quality index based on at least one criteria of quality.

Abstract translation: 用于真空腔室的气体分析器包括处理电子器件，其被配置为接收质谱数据，接收真空腔室中的总压力的输入，接收来自至少一个传感器的外部输入，并且使用质谱数据，真空腔室中的总压力 以及来自所述至少一个传感器的外部输入，以基于至少一个质量标准来计算真空质量指数。

公开(公告)号：WO2011057201A2

公开(公告)日：2011-05-12

申请号：PCT/US2010/055852

申请日：2010-11-08

Applicant: BROOKS AUTOMATION, INC. ,  BRUCKER, Gerardo, A. ,  VAN ANTWERP, Kenneth, D., Jr.

Inventor： BRUCKER, Gerardo, A. ,  VAN ANTWERP, Kenneth, D., Jr.

IPC: G01L21/00 ,  G01J3/28 ,  G01N21/25 ,  H01L21/66

CPC classification number: G01M3/226 ,  G01M3/205 ,  G01M3/229 ,  G01M3/34

Abstract: A gas analyzer for a vacuum chamber includes processing electronics configured to receive mass spectral data, receive input of total pressure in the vacuum chamber, receive external input from at least one sensor, and employ the mass spectral data, the total pressure in the vacuum chamber, and the external input from the at least one sensor to calculate a vacuum quality index based on at least one criteria of quality.

Abstract translation: 用于真空室的气体分析器包括处理电子器件，其被配置为接收质谱数据，接收真空室中的总压力的输入，从至少一个传感器接收外部输入，并使用质谱数据，真空室中的总压力 以及来自至少一个传感器的外部输入，以基于至少一个质量标准来计算真空质量指数。

公开(公告)号：WO2010129690A2

公开(公告)日：2010-11-11

申请号：PCT/US2010033750

申请日：2010-05-05

Applicant: BROOK AUTOMATION INC ,  BRUCKER GERARDO A ,  VAN ANTWERP KENNETH D ,  RATHBONE G JEFFERY ,  HEINBUCH SCOTT C ,  SCHOTT MICHAEL N

Inventor： BRUCKER GERARDO A ,  VAN ANTWERP KENNETH D ,  RATHBONE G JEFFERY ,  HEINBUCH SCOTT C ,  SCHOTT MICHAEL N

IPC: H01J49/42 ,  G01N27/62 ,  H01J49/26

CPC classification number: H01J49/4245 ,  H01J49/0063 ,  H01J49/429

Abstract: An ion trap includes an electrode structure, including a first and a second opposed mirror electrodes and a central lens therebetween, that produces an electrostatic potential in which ions are confined to trajectories at natural oscillation frequencies, the confining potential being anharmonic. The ion trap also includes an AC excitation source having an excitation frequency f that excites confined ions at a frequency of about twice the natural oscillation frequency of the ions, the AC excitation frequency source preferably being connected to the central lens. In one embodiment, the ion trap includes a scan control that mass selectively reduces a frequency difference between the AC excitation frequency and about twice the natural oscillation frequency of the ions.

Abstract translation: 离子阱包括电极结构，其包括第一和第二相对的镜电极和它们之间的中心透镜，其产生静电电位，其中离子被限制在固有振荡频率处的轨迹，限制电位是非调谐的。 离子阱还包括具有激发频率f的AC激发源，激发频率f以约离子的固有振荡频率的大约两倍的频率激发约束离子，AC激发频率源优选地连接到中心透镜。 在一个实施例中，离子阱包括扫描控制，质量选择性地降低AC激发频率与离子的固有振荡频率的大约两倍之间的频率差。