公开(公告)号：KR100727789B1

公开(公告)日：2007-06-13

申请号：KR1020060003402

申请日：2006-01-12

Applicant: (주)미래컴퍼니

Inventor： 박동원 ,  이규철 ,  임상덕

IPC: G02F1/13

Abstract: A glass substrate table is provided to stably form vacuum pressure even with simple constitution, thereby stably holding a substrate, by forming an inner structure of the glass substrate table in a Bernoulli type so as to generate vacuum adsorptive power. A glass substrate table is used to hold a glass substrate on an upper surface thereof. The glass substrate has small-sized lines(32) and large-sized lines(31) therein, wherein the small-sized lines and the large-sized lines are continually connected so as to vary the speed of air stream. Vacuum lines(33) are respectively joined to the small-sized lines or the large-sized lines, wherein each of the vacuum lines is connected to a vacuum groove(6) formed in a surface of the glass substrate table.

Abstract translation: 通过以伯努利型形成玻璃基板台的内部结构以产生真空吸附力，玻璃基板台设置成即使以简单的构造稳定地形成真空压力，由此稳定地保持基板。 使用玻璃衬底台将玻璃衬底保持在其上表面上。 玻璃基板在其中具有小尺寸线（32）和大尺寸线（31），其中小尺寸线和大尺寸线连续连接以改变气流的速度。 真空线（33）分别连接到小尺寸线或大尺寸线，其中每个真空线连接到形成在玻璃衬底台的表面中的真空槽（6）。