公开(公告)号：KR100844121B1

公开(公告)日：2008-07-07

申请号：KR1020070072731

申请日：2007-07-20

Applicant: (주)에스엔텍 ,  한국산업기술대학교산학협력단

Inventor： 안경준 ,  최기철 ,  장근원 ,  송용원

IPC: H01L21/304 ,  B08B6/00

CPC classification number: H01L21/67017 ,  H01L21/02041 ,  H01L27/14623

Abstract: An atmospheric pressure plasma apparatus, an infrared filter in-line assembly of a camera module including the same, a cleaning method using the same, and an infrared filter in-line assembling method of a cellular phone camera module using the same are provided to prevent reattachment of foreign materials by performing a nitrogen blowing process. An internal case(210) is formed to protect an internal device. A first electrode(220) is installed in the inside of the internal case. A gas line(230) is installed in the inside of the first electrode in order to exhaust a mixed gas through a plurality of holes. A dielectric(240) is formed on one surface of the first electrode. A conductive layer(250) is formed between the first electrode and the dielectric. A second electrode(260) is formed at a constant interval from the dielectric. A plurality of injection nozzles are formed in a constant interval on the second electrode. A mesh(270) is formed on a surface of the second electrode. The first electrode is separated at a constant interval from the dielectric in an inner surface of the internal case. The mixed gas and the plasma are discharged through the injection nozzles.

Abstract translation: 提供大气压等离子体装置，包括该装置的相机模块的红外线过滤器在线组装，使用该装置的清洁方法以及使用其的蜂窝电话摄像机模块的红外线滤波器在线组装方法以防止 通过进行氮气吹扫过程重新附着异物。 形成内部壳体（210）以保护内部装置。 第一电极（220）安装在内部壳体的内部。 气体管线（230）安装在第一电极的内部，以通过多个孔排出混合气体。 电介质（240）形成在第一电极的一个表面上。 在第一电极和电介质之间形成导电层（250）。 第二电极（260）以与电介质一定的间隔形成。 在第二电极上以恒定的间隔形成多个喷嘴。 网格（270）形成在第二电极的表面上。 第一电极在内部壳体的内表面中与电介质以恒定的间隔分开。 混合气体和等离子体通过注射喷嘴排出。