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公开(公告)号:KR1020120079293A
公开(公告)日:2012-07-12
申请号:KR1020110000512
申请日:2011-01-04
Applicant: (주)엠투엔
Inventor: 김형익
CPC classification number: H01L22/30 , G01R1/07307 , H01L22/00 , H01L22/14
Abstract: PURPOSE: A probe card is provided to improve workability of a space transformer by detaching the space transformer through assembling and disassembling of a screw to a bracket member. CONSTITUTION: A space transformer(140) is formed on the lower side of a bracket member(130). A connecting member(150) is formed in a first through hole(121) and a second through hole(131). The connecting member electrically connects a distance control circuit(141) and a test circuit. Probes(160) are formed on the lower side of the space transformer.
Abstract translation: 目的:提供探针卡,以通过将螺钉组装和拆卸到支架构件上来分离空间变压器来提高空间变压器的可操作性。 构成:在支架构件(130)的下侧形成空间变换器(140)。 连接构件(150)形成在第一通孔(121)和第二通孔(131)中。 连接构件电连接距离控制电路(141)和测试电路。 探针(160)形成在空间变压器的下侧。
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公开(公告)号:KR101674135B1
公开(公告)日:2016-11-09
申请号:KR1020100003060
申请日:2010-01-13
Applicant: (주)엠투엔
CPC classification number: G01R31/2886 , G01R3/00
Abstract: 프로브카드는탐침구조물들, 조각기판들, 인터페이스블록들, 지지기판및 회로기판을포함한다. 탐침구조물들은물리적접촉을통해검사대상체의칩 패드에전기적신호를송수신하는탐침을갖는다. 조각기판들은탐침구조물들의하부에각각배치되고, 탐침과전기적으로연결되며상하부면에서간격이서로다른배선들을갖는다. 인터페이스블록들은조각기판들의하부에각각배치되고, 배선들과각각연결되며상하부면에서간격이동일한연결부재들을갖는다. 지지기판은인터페이스블록들이각각착탈가능하도록삽입되는관통홀들을가지며, 인터페이스블록들을지지한다. 회로기판은지지기판의하부에배치되며, 인터페이스블록들의연결부재들과각각전기적으로연결되는배선들을갖는다.
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公开(公告)号:KR1020110083053A
公开(公告)日:2011-07-20
申请号:KR1020100003060
申请日:2010-01-13
Applicant: (주)엠투엔
CPC classification number: G01R31/2886 , G01R3/00 , G01R1/0491 , G01R1/07378 , G01R31/2853 , G01R31/2889
Abstract: PURPOSE: A probe card is provided to accurately align an interface block on a supporting substrate using a guide hole of the supporting substrate and a guide pin of the interface block. CONSTITUTION: A probe structure(100) includes a probe which transceives an electrical signal to a chip pad of an inspected object by physical contact. Piece substrates(200) are electrically connected to the probe. Interface blocks(300) are arranged in the lower parts of the piece substrates respectively. A supporting substrate(400) supports the interface blocks. A circuit board(500) comprises a wire(510) which is electrically connected to a connecting member(310) of the interface blocks.
Abstract translation: 目的:提供一个探针卡,用于使用支撑基板的导孔和界面块的引导孔精确对准支撑基板上的界面块。 构成:探针结构(100)包括通过物理接触将电信号收发到检查对象的芯片焊盘的探针。 片状基板(200)电连接到探针。 接口块(300)分别布置在片状基片的下部。 支撑基板(400)支撑接口块。 电路板(500)包括电连接到接口块的连接构件(310)的导线(510)。
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公开(公告)号:KR1020100084728A
公开(公告)日:2010-07-28
申请号:KR1020090004014
申请日:2009-01-19
Applicant: (주)엠투엔
CPC classification number: G01R1/06733 , G01R1/073 , G01R31/2886
Abstract: 개시된프로브어셈블리는프로브와가이드를구비한다. 프로브는프로브기판의패드상에위치하는고정부와, 상기고정부에기립구조로연결되고, 상기고정부와연결되는부분의면적은상기고정부보다작은면적을갖는기둥부와, 상기기둥부에켄틸레버구조로연결되고, 상기기둥부와연결되는부분은단차를갖는빔부, 그리고상기빔부의일단에기립구조로연결되고, 전기검사를수행할때 피검사체와접촉하는접촉부를포함한다. 가이드는그 일면은상기고정부와면접하면서상기일면에대향하는타면은상기빔부의표면을노출시킴과아울러상기접촉부를돌출시키는관통홀을갖고, 상기관통홀에상기기둥부와빔부가삽입됨에의해상기프로브를지지한다.
Abstract translation: 目的:提供用于检查电子测试的探针和包括其的探针组件,以通过连接具有水平差的梁部和柱部来固定插入到引导件中的区域。 构成:固定部件(10)位于探针板的焊盘上。 支柱部分(12)与固定部分电连接。 梁部分(14)以悬臂结构与柱部分连接。 梁部分和柱部分之间的连接部分具有水平差。 接触部分(16)与梁结构的一端连接。 带有通孔的导轨支撑探头。
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公开(公告)号:KR101805816B1
公开(公告)日:2017-12-07
申请号:KR1020110000512
申请日:2011-01-04
Applicant: (주)엠투엔
Inventor: 김형익
Abstract: 프로브카드는검사회로가형성된인쇄회로기판과, 인쇄회로기판의하부에배치되고제1 관통홀을갖는디스크부재와, 디스크부재의하부에배치되고제1 관통홀과이어진제2 관통홀을갖는브래킷부재와, 브래킷부재의하부에배치되고상하면을연결하는간격조절회로가형성된공간변형기와, 제1 및제2 관통홀내에배치되고공간변형기의간격조절회로와인쇄회로기판의검사회로를전기적으로연결하는연결부재와, 공간변형기의하부에배치되고간격조절회로와전기적으로연결된탐침들을포함한다. 따라서, 브래킷부재에대한나사결합및 해제를통한공간변형기의탈부착이이루어지므로, 공간변형기의작업성및 리페어특성이향상된다.
Abstract translation: 具有通孔和第二盘构件的印刷电路板中形成的测试电路探针卡托架构件,配置在具有第一通孔的印刷电路板的下部,它设置在磁盘bujaeui通孔下部引导到第一 和设置在下方的支架bujaeui和空间的间隙调整电路,用于修饰基团;布置在所述第一通孔mitje第二连接将所述上和下表面形成,并且电连接到所述距离控制电路和所述空间中的换能器构件的印刷电路板的测试电路 以及设置在空间换能器下面并电连接到间隔控制电路的探针。 因此,由于空间转换件通过螺合和松开而可拆卸地安装到支架构件上和从支架构件上拆卸下来,因此提高了空间转换件的可操作性和修理性能。
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公开(公告)号:KR101534110B1
公开(公告)日:2015-07-20
申请号:KR1020090004014
申请日:2009-01-19
Applicant: (주)엠투엔
Abstract: 개시된프로브어셈블리는프로브와가이드를구비한다. 프로브는프로브기판의패드상에위치하는고정부와, 상기고정부에기립구조로연결되고, 상기고정부와연결되는부분의면적은상기고정부보다작은면적을갖는기둥부와, 상기기둥부에켄틸레버구조로연결되고, 상기기둥부와연결되는부분은단차를갖는빔부, 그리고상기빔부의일단에기립구조로연결되고, 전기검사를수행할때 피검사체와접촉하는접촉부를포함한다. 가이드는그 일면은상기고정부와면접하면서상기일면에대향하는타면은상기빔부의표면을노출시킴과아울러상기접촉부를돌출시키는관통홀을갖고, 상기관통홀에상기기둥부와빔부가삽입됨에의해상기프로브를지지한다.
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公开(公告)号:KR1020110139827A
公开(公告)日:2011-12-30
申请号:KR1020100059884
申请日:2010-06-24
Applicant: (주)엠투엔
CPC classification number: H01L22/14 , G01R1/07342 , G01R31/2889
Abstract: PURPOSE: A probe card and a method for manufacturing the same are provided to improve the junction efficiency of space transformer forming a metal coating layer in the junction area of a support unit. CONSTITUTION: In a probe card and a method for manufacturing the same, a test circuit is formed in a printed circuit board(110). A disk member(120) comprises a plurality of penetration holes(121) Supporting parts are included in the both ends of the penetration hole. A plurality of space transformers(130) are welded on supporting parts. A plurality of space transformers have a interval between the bottoms of the disk member. A plurality of connecting members(140) interlinks the space transformers to the test circuit. A plurality of probes are connected to the bottom of the space transformers.
Abstract translation: 目的:提供探针卡及其制造方法,以提高在支撑单元的接合区域中形成金属涂层的空间变压器的结效率。 构成:在探针卡及其制造方法中,在印刷电路板(110)上形成测试电路。 盘构件(120)包括多个贯穿孔(121)贯穿孔的两端包括支撑部。 多个空间变压器(130)被焊接在支撑部件上。 多个空间变压器在盘构件的底部之间具有间隔。 多个连接构件(140)将空间变压器互连到测试电路。 多个探头连接到空间变压器的底部。
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