Coating device
    5.
    发明专利

    公开(公告)号:JP5321770B2

    公开(公告)日:2013-10-23

    申请号:JP2005089834

    申请日:2005-03-25

    Inventor: 孝 青木

    Abstract: PROBLEM TO BE SOLVED: To provide a method and an apparatus for coating capable of coating a low-volatile liquid by a die coating method while suppressing the thickening in the end part and the phenomenon of reducing the coating width. SOLUTION: When coating while moving a die head 12 along a substrate 1 to be coated, a drying device 13 is installed being close to the back side of the die head 12 so as to move together with it. A coating film 2 formed on the upper surface of the substrate 1 by the die head 12 is immediately dried by the drying device 13, thereby suppressing the thickening in the end part and the phenomenon of reducing the coating width which are caused when the coated film is slowly dried. As a result, a uniform coating film can be formed. COPYRIGHT: (C)2007,JPO&INPIT

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