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公开(公告)号：JP5920213B2
公开(公告)日：2016-05-18
申请号：JP2012510626
申请日：2011-04-05
Applicant: 宇部興産株式会社
IPC: H01L33/64
CPC classification number: F28F21/089 , H01L33/641 , H05K1/0203 , H05K1/189 , H05K3/022 , H05K2201/0154 , H05K2201/0355 , H05K2201/10106
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