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公开(公告)号：JP6155490B2
公开(公告)日：2017-07-05
申请号：JP2015553311
申请日：2013-12-20
Applicant: 日本アイ・ティ・エフ株式会社
CPC classification number: C23C16/54 , C23C14/566 , H01L21/6719
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