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公开(公告)号：JP5738257B2
公开(公告)日：2015-06-17
申请号：JP2012228835
申请日：2012-10-16
Applicant: 株式会社エルム
IPC: H01L33/48
CPC classification number: H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2224/48465 , H01L2924/181
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