公开(公告)号：JP4252258B2

公开(公告)日：2009-04-08

申请号：JP2002153083

申请日：2002-05-27

Applicant: 株式会社Sumco

Inventor： 剛志 久保田 ,  一弘 山本 ,  丈弘 常森

IPC: H01L21/66

公开(公告)号：JP5332478B2

公开(公告)日：2013-11-06

申请号：JP2008259804

申请日：2008-10-06

Applicant: 株式会社Sumco

Inventor： 栄治 神山 ,  丈弘 常森 ,  一弘 山本 ,  健司 青木

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N2201/1045 ,  G01N2201/106

Abstract: A laser scattering defect inspection system includes: a stage unit that rotates a workpiece W and transports the workpiece W in one direction; a laser light source that emits a laser beam LB toward the workpiece W mounted on the stage unit; an optical deflector that scans the laser beam LB emitted from the laser light source on the workpiece W; an optical detector that detects the laser beam LB scattered from the surface of the workpiece W; a storage unit that stores defect inspection conditions for each inspection step of a manufacturing process of the workpiece W, where the conditions include the rotation speed and the moving speed of the workpiece W by the stage unit, the scan width on the workpiece W and the scan frequency by the optical deflector; and a control unit that reads the defect inspection conditions stored for each inspection step in the storage unit and controls the driving of the stage unit and the optical deflector under the conditions.