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公开(公告)号：KR100459847B1
公开(公告)日：2004-12-03
申请号：KR1020010043283
申请日：2001-07-19
Applicant: 고등기술연구원연구조합
IPC: H05H1/34
Abstract: PURPOSE: An electrode structure is provided to be capable of improving a jet distance by forming an inner electrode structure with a coil or net shape. CONSTITUTION: A jet tube(32) is installed in an outer electrode(31) of a pipe shape that is formed at the outermost place. An inner electrode(33) is installed in the jet tube(32) so as to be coiled. The length of the jet tube(32) is longer than the outer electrode(31) or the inner electrode(33), so as to prevent arc discharge between the outer electrode(31) and the inner electrode(33). The jet tube(32) is coated or contacted on the outer electrode(31) so as for a reaction gas to flow into the jet tube(32).
Abstract translation: 目的：通过形成具有线圈或网状的内部电极结构，提供了能够改善喷射距离的电极结构。 组成：射流管（32）安装在形成在最外面的管形状的外部电极（31）中。 内部电极（33）安装在喷射管（32）中以卷绕。 喷射管（32）的长度比外部电极（31）或内部电极（33）长，以防止外部电极（31）和内部电极（33）之间的电弧放电。 喷射管（32）涂覆或接触外电极（31）以使反应气体流入喷射管（32）。
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公开(公告)号：KR1020030060645A
公开(公告)日：2003-07-16
申请号：KR1020020001552
申请日：2002-01-10
Applicant: 고등기술연구원연구조합
IPC: B29B17/00
CPC classification number: Y02W30/62
Abstract: PURPOSE: Provided is a powder recycling equipment using normal pressure plasma spray which applies normal pressure plasma technique to a cyclone system to cut sulfur bond on the surface of a rubber powder effectively so that it contributes to produce rubber with excellent property. CONSTITUTION: The powder recycling equipment using normal pressure plasma spray comprises the parts of: a gas injector which injects carrier gas; an injection pipe(206) for gas and powder which transfers powder for reaction to the carrier gas; a reaction pipe(210) which treats the injected powder by plasma flame sprayed from a plasma generation pipe(220-1,220-2,220-3); a releasing pipe(208) for gas and powder which moves the treated powder by gas; and a separator which separates gas and powder entered from the releasing pipe to release gas outside and send powder to the injection pipe for gas and powder again.
Abstract translation: 目的：提供使用常压等离子体喷涂的粉末回收设备，其将正压等离子体技术应用于旋风系统以有效地切割橡胶粉末表面的硫键，从而有助于生产具有优异性能的橡胶。 规定：使用常压等离子体喷涂的粉末回收设备包括：喷射载气的气体喷射器; 用于气体和粉末的注入管（206），其将用于反应的载体的粉末输送到载气; 反应管（210），其通过从等离子体产生管（220-1,220-2,220-3）喷射的等离子体火焰来处理注入的粉末; 用于气体和粉末的释放管（208），其用气体移动处理过的粉末; 以及分离器，其分离从释放管进入的气体和粉末，以将外部的气体释放出来，并再次将粉末送到注入管中用于气体和粉末。
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公开(公告)号：KR1020020095850A
公开(公告)日：2002-12-28
申请号：KR1020010034109
申请日：2001-06-16
Applicant: 고등기술연구원연구조합
Abstract: PURPOSE: An electrode for atmospheric pressure discharge and a coating method therefor are provided to improve the uniformity of dielectric regardless of the shape of electrode by spraying a dielectric containing Al2O3 and Ti for coating the electrode. CONSTITUTION: The electrode for atmospheric discharge has a structure that a dielectric(1) is formed on a surface of a metal member(2). The metal member(2) is one of a plate type or bar type. The dielectric(1) is a material of Al2O3 containing Ti in a small quantity and is sprayed on the surface of the metal member(2) with a thickness of about 0.1-2.0mm. A coating layer(4) containing a nickel is provided between the metal member(2) and the dielectric(1) to increase the adherent therebetween. In order to prevent the breakdown of the dielectric(1), an epoxy resin(3) is infiltrated into air gaps of the dielectric(1).
Abstract translation: 目的：提供一种用于大气压力放电的电极及其涂覆方法，以通过喷涂包含Al 2 O 3和Ti的电介质来涂覆电极来改善电介质的均匀性，而与电极的形状无关。 构成：用于大气排放的电极具有在金属构件（2）的表面上形成电介质（1）的结构。 金属构件（2）是板式或棒式中的一种。 电介质（1）是含有少量Ti的Al 2 O 3的材料，并且以约0.1-2.0mm的厚度喷涂在金属构件（2）的表面上。 在金属构件（2）和电介质（1）之间设置包含镍的涂层（4），以增加它们之间的附着力。 为了防止电介质（1）的破坏，环氧树脂（3）渗透到电介质（1）的气隙中。
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公开(公告)号：KR100317730B1
公开(公告)日：2001-12-24
申请号：KR1019990053405
申请日：1999-11-29
Applicant: 고등기술연구원연구조합
IPC: C23C8/10
Abstract: 본발명은산화피막형성방법에관한것으로서, 기존의플라즈마질화및 산화공정시문제가되는질화층의다공성제어와산화층의상조절, 질화층과산화막간의밀착력향상을위한구체적인대안을제시하여내식성및 내마모특성에있어종래보다크게개선된산화피막을형성시킬수 있도록함에그 목적이있다. 이를위해구성되는본 발명은스퍼터링공정으로시료표면의산화막을제거하는공정, 질화용가스를주입하되 500∼550℃의온도범위에서 550V 미만의전압을인가하여시료의표면에치밀한화합물층을형성하는공정, 시료의표면에화합물층을형성한후 Fe와 O이온의확산이용이하도록화합물층을형성하는공정에서보다질소의양을 100sccm이상높이고온도를 10∼20℃이상상승시키며전압을 10V 이상높여최소 2㎛이상의다공성질화층을형성하는공정, 산소공급원으로산소, 수증기를단독혹은이들의적당한혼합으로이루어진산화가스를주입하는공정, 산화가스분위기에서 400∼700V의전압을인가하여플라즈마산화처리를하되전체처리시간의전반 1/3 시간에산소또는수증기의유량을 200sccm 미만으로하여 1차산화하는공정, 1차산화시보다공급되는산소또는수증기의유량을줄여나머지공정의 2/3 시간동안느린속도로산화반응을진행시켜산화막을형성하는공정및 질소가스를주입하여시료를냉각시키는공정을포함하여이루어진다.
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公开(公告)号：KR1020010056642A
公开(公告)日：2001-07-04
申请号：KR1019990058200
申请日：1999-12-16
Applicant: 고등기술연구원연구조합
IPC: H01L21/3065
Abstract: PURPOSE: An atmosphere pressure plasma discharging system using a high frequency plasma source is provided to maximumly transmit energy from a plasma source to a plasma and simultaneously coincide a collision frequency between particles inside of the plasma with the frequency of the plasma source. CONSTITUTION: The atmosphere pressure discharging system includes a high frequency plasma source generating plasma source(1), a power supply(2), a chamber(9), a waveguide(3), a holder and a holder bias. The high frequency plasma source generating source generates a high frequency plasma source more than a K-band. The power supply supplies a predetermined operating power to the high frequency plasma source generating source. An atmosphere pressure plasma discharge is proceeded in the chamber. The waveguide transmits the high frequency plasma source generated from the high frequency plasma source generating source to the chamber. The holder safely loads a predetermined object. The holder bias applies a bias to the holder.
Abstract translation: 目的：提供使用高频等离子体源的大气压等离子体放电系统，以将等离子体源的能量最大化地传递到等离子体，同时使等离子体内部的粒子之间的碰撞频率与等离子体源的频率一致。 构成：大气压力放电系统包括产生等离子体源（1），电源（2），室（9），波导（3），保持器和保持器偏压的高频等离子体源。 高频等离子体源发生源产生比K波段多的高频等离子体源。 电源向高频等离子体源发生源提供预定的工作电力。 在室内进行大气压等离子体放电。 波导将从高频等离子体源发生源产生的高频等离子体源传输到腔室。 支架安全地装载预定的对象。 支架偏置对支架施加偏压。
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Patent Agency Ranking
公开(公告)号：KR1020010045161A
公开(公告)日：2001-06-05
申请号：KR1019990048355
申请日：1999-11-03
Applicant: 고등기술연구원연구조합
Abstract: PURPOSE: A device of direct measurement of a plasma ion nitriding fire pot is provided to directly measure an exact temperature in a direct contact method when a high voltage is applied to material processed on a cathode plate of the plasma ion nitriding fire pot. CONSTITUTION: A device of direct measurement of the plasma ion nitriding fire pot includes a thermocouple(22), an optocoupler(24), DC/DC converter module(26), and a DC power supplier(28). The thermocouple is a temperature sensor directly contacted to material(2) without any additional tools for measuring temperature of the material. The optocoupler has an LED(Light Emitting Diode)(24a) and a photodiode(24b) connected to the thermocouple. The DC/DC converter module is connected to the optocoupler, provides power source supplied to the LED and the photodiode in DC, converts DC voltage into AC voltage and converts again the AC voltage into DC voltage by power division. The DC power supplier is connected to the DC converter module.
Abstract translation: 目的：提供等离子体离子氮化火锅的直接测量装置，以便在对等离子体氮化火炉的阴极板上加工的材料施加高电压时直接测量直接接触方法中的精确温度。 构成：直接测量等离子体氮化火炉的装置包括热电偶（22），光耦合器（24），DC / DC转换器模块（26）和直流电源（28）。 热电偶是直接与材料（2）接触的温度传感器，没有任何额外的工具来测量材料的温度。 光耦合器具有连接到热电偶的LED（发光二极管）（24a）和光电二极管（24b）。 DC / DC转换器模块连接到光耦合器，提供给LED的电源和DC的光电二极管，将直流电压转换为交流电压，并通过分频将交流电压再次转换为直流电压。 直流电源连接到直流转换器模块。
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公开(公告)号：KR100288320B1
公开(公告)日：2001-05-02
申请号：KR1019980063765
申请日：1998-12-31
Applicant: 고등기술연구원연구조합
Abstract: 본 발명은 플라즈마를 이용한 질화공정 기술에 관한 것으로서, 금속 표면에 질소가 침투되는 경화깊이를 1mm 이상 형성시킬 수 있도록 하여 표면 부하를 크게 요구하는 공구강 및 기계부품의 경화처리에 적용할 수 있는 플라즈마를 이용한 질화공정 방법 및 그 장치를 제공함에 그 목적이 있다. 이를 위해 구성되는 본 발명은 금속재료에 인가되는 질화공정의 반응온도는 600∼700℃로 가열하고, 혼합가스의 투입시 황(S) 가스를 추가 투입시키며, 금속재료에 인가되는 펄스형 음전압을 1kV 이상 인가하는 한편, 반응로 내의 플라즈마 밀도를 높이는 유도 플라즈마 발생 공정의 추가에 의해 금속재료와 질화 활성인자인 활성 중성 질소입자와 질소 라디칼의 에너지 및 그 수를 증대시켜 금속재료의 표면과 이온의 반응 작용을 증대시킬 수 있도록 한 것이다. 또한, 본 발명의 기계적인 구성은 이온질화 반응이 일어나는 반응로, 금속재료를 올려놓는 시료대, 반응로를 진공 상태로 만드는 로터리 펌프, 반응로의 반응온도를 승온시키는 히터, 가스를 투입시키는 가스 투입부, 금속재료에 펄스형 음전압을 인가하는 펄스 음전압 발생기 및 유도 플라즈마 발생 공정을 가능하게 하는 유도 전압 발생기를 포함하여 이루어진다.
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公开(公告)号：KR1020000062191A
公开(公告)日：2000-10-25
申请号：KR1019990055561
申请日：1999-12-07
Applicant: 고등기술연구원연구조합
IPC: C23C8/36
Abstract: PURPOSE: A method of forming an AlN layer of an aluminium component is provided to enhance corrosion resistance and heat exchanging efficiency by forming a precise and equal AlN layer on a complex three-dimensional component having small holes or bending portions. CONSTITUTION: A vacuum reaction chamber has 10¬-5 to 10¬-6 torr of vacuum by an exhaust device. Gas for preprocessing is injected into the vacuum reaction chamber through a gas supplier. Then, a temperature of the reaction chamber rises up. The surface of an aluminium component is preprocessed by employing argon plasma for removing an oxide film. After that, nitrogen gas is injected into the vacuum reacting chamber and high voltage is fed to the chamber in anode state of a sample table and a reacting chamber wall. Finally, an AlN layer is formed on the surface of the aluminium component with a nitrogen plasma.
Abstract translation: 目的：提供一种形成铝部件的AlN层的方法，以通过在具有小孔或弯曲部分的复杂三维部件上形成精确且相等的AlN层来提高耐腐蚀性和热交换效率。 构成：真空反应室通过排气装置具有10 -5至10 -6托的真空度。 用于预处理的气体通过气体供应器注入真空反应室。 然后，反应室的温度升高。 通过使用氩等离子体来除去氧化膜，对铝成分的表面进行预处理。 之后，将氮气注入到真空反应室中，并且在样品台和反应室壁的阳极状态下将高压进料到室中。 最后，用氮等离子体在铝部件的表面上形成AlN层。
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公开(公告)号：KR1020000055219A
公开(公告)日：2000-09-05
申请号：KR1019990003730
申请日：1999-02-04
Applicant: 고등기술연구원연구조합
IPC: C23C14/34
Abstract: PURPOSE: A method for treating surfaces is provided to obtain treated surfaces having good wear resistant property, corrosion resistant property and fatigue resistant property. CONSTITUTION: A method for treating surfaces according to the present invention comprises the steps: a) introducing a charge into a plasm nitriding vacuum chamber and heating to the temperature above 300 degees celsius; b) plasma nitriding the charge under the atmosphere containing nitrogen and hydrogen gases; and c) maintaining the partial pressure of nitrogen in the chamber enough high to form a compound in the first half of the plasma nitriding process and carrying out plasma nitriding at partial pressure of nitrogen lower than that of the first half in the latter half of the plasma nitriding process. In a method according to the other embodiment of the present invention comprises the following step c') instead of the said step c): c') carrying out plasma nitriding while the partial pressure of nitrogen in the chamber is periodically changed.
Abstract translation: 目的：提供一种处理表面的方法，以获得具有良好耐磨性，耐腐蚀性和抗疲劳性能的处理表面。 构成：根据本发明的处理表面的方法包括以下步骤：a）将电荷引入等离子体氮化真空室并加热至高于300摄氏度的温度; b）在含有氮气和氢气的气氛下等离子体氮化电荷; 和c）在等离子体氮化处理的前半部分中保持室内的氮分压足够高以形成化合物，并且在低于下半部分的前半部分的氮分压下进行等离子体氮化 等离子体氮化处理。 在根据本发明的另一实施方案的方法中，包括以下步骤c'）代替所述步骤c）：c'），其中室中的氮分压周期性地改变，进行等离子体氮化。
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公开(公告)号：KR2020000014267U
公开(公告)日：2000-07-25
申请号：KR2019980027565
申请日：1998-12-30
Applicant: 고등기술연구원연구조합
IPC: H01J29/76
Abstract: 본 고안은 편향요크의 전자기파 차폐장치에 관한 것으로서, 더욱 상세하게는, 브라운관에 장착되는 편향요크로부터 방사되는 전자기파를 차폐하기 위한 차폐장치를 얻기 위한 것인 바,
브라운관의 편향요크가 삽입이 가능한 원통이며, 소정의 투자율을 갖는 재료인 뮤 금속(Mu-metal) 또는 강자성체로 된 재질로 일정한 두께와 접지부를 구비함으로써, 소정의 투자율을 가지는 원통형의 전자기파 차단 장치를 편향요크의 중심축으로 장착하여 편향요크 외부로 누설되는 전자기파를 차폐함으로써 인체에 유해한 전자기파를 차단하고 제품의 안정성과 신뢰성을 갖는 매우 뛰어난 특징이 있다.
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