公开(公告)号：KR102127959B1

公开(公告)日：2020-06-29

申请号：KR1020180155135

申请日：2018-12-05

Applicant: 고등기술연구원연구조합

Inventor： 양재교 ,  진연호 ,  정우철 ,  최진주

IPC: C25D11/06 ,  C25D11/02

公开(公告)号：KR100460635B1

公开(公告)日：2004-12-09

申请号：KR1020010030104

申请日：2001-05-30

Applicant: 고등기술연구원연구조합

Inventor： 이근호 ,  최진주 ,  김윤기 ,  홍정미 ,  송호영

IPC: H05H1/46

Abstract: PURPOSE: A microwave plasma electric discharging system using an open resonator is provided which is efficient and economical by overcoming a limitation of a surface treatment due to a scale-up problem of the conventional resonator and by enabling an in-line processing. CONSTITUTION: According to the microwave plasma electric discharging system comprising a microwave source(3) generating a microwave and a resonator part(7) performing a plasma electric discharging using an energy obtained by resonating the above microwave, the resonator part has an open part formed to proceed an object to be processed into/out of the resonator part during the plasma discharge. The resonator part is transferred with the energy from a waveguide of a connected coaxial structure. A coupling hole is formed between the resonator part and the coaxial structure.

Abstract translation: 目的：提供一种使用开放式谐振器的微波等离子体放电系统，其通过克服由于传统谐振器的放大问题引起的表面处理的限制并且能够进行在线处理而高效且经济。 本发明的微波等离子体放电系统包括产生微波的微波源（3）和利用使上述微波发生共振而得到的能量进行等离子体放电的谐振器部（7），谐振器部具有形成的开口部 在等离子体放电期间处理待加工物体进出谐振器部分的物体。 谐振器部分利用来自连接的同轴结构的波导的能量传输。 谐振器部分和同轴结构之间形成耦合孔。

公开(公告)号：KR102119722B1

公开(公告)日：2020-06-08

申请号：KR1020180059436

申请日：2018-05-25

Applicant: 고등기술연구원연구조합

Inventor： 양재교 ,  진연호 ,  정우철 ,  최진주

IPC: C25D11/02 ,  C25D11/16 ,  C25D11/06 ,  C25D11/18 ,  C22C21/02

公开(公告)号：KR1020020091857A

公开(公告)日：2002-12-11

申请号：KR1020010030105

申请日：2001-05-30

Applicant: 고등기술연구원연구조합

Inventor： 이근호 ,  최진주 ,  김윤기 ,  홍정미 ,  송호영

IPC: H05H1/46

Abstract: PURPOSE: A plasma discharge system using multiple resonant modes is provided to enhance energy coupling efficiency and improve the uniformity of plasma by exciting a multi-mode overlaid with the multiple resonant modes within a resonator. CONSTITUTION: A driver(1) is used for generating microwaves. A divider(2) is used for receiving and passing the microwaves from the driver(1). A traveling wave tube(3) is used for receiving the microwaves from the divider(2) and generating multiple frequencies having wide bandwidth. The divider(2), a circulator(4), and a dummy load(6) are used for preventing reflection and controlling the microwaves. The circulator(4) is used for passing the microwaves to a resonator(7). The dummy load(6) is used for absorbing the heat from the microwaves by using a water cooling unit. A directional coupler(5) is used for measuring a forward power inputted into the resonator(7) and a reflected power reflected from the resonator(7). The resonator(7) is used for generating plasma by using the multiple modes.

Abstract translation: 目的：提供一种使用多个谐振模式的等离子体放电系统，以通过激励谐振器内多重谐振模式的多重模式激发来提高能量耦合效率并提高等离子体的均匀性。 构成：驱动器（1）用于产生微波。 分配器（2）用于从驱动器（1）接收和通过微波。 行波管（3）用于从分频器（2）接收微波并产生具有宽带宽的多个频率。 分隔器（2），循环器（4）和虚拟负载（6）用于防止微波的反射和控制。 循环器（4）用于将微波传递到谐振器（7）。 虚拟负载（6）用于通过使用水冷单元吸收来自微波的热量。 定向耦合器（5）用于测量输入到谐振器（7）的正向功率和从谐振器（7）反射的反射功率。 谐振器（7）用于通过使用多种模式来产生等离子体。

公开(公告)号：KR1020020091431A

公开(公告)日：2002-12-06

申请号：KR1020010030104

申请日：2001-05-30

Applicant: 고등기술연구원연구조합

Inventor： 이근호 ,  최진주 ,  김윤기 ,  홍정미 ,  송호영

IPC: H05H1/46

Abstract: PURPOSE: A microwave plasma electric discharging system using an open resonator is provided which is efficient and economical by overcoming a limitation of a surface treatment due to a scale-up problem of the conventional resonator and by enabling an in-line processing. CONSTITUTION: According to the microwave plasma electric discharging system comprising a microwave source(3) generating a microwave and a resonator part(7) performing a plasma electric discharging using an energy obtained by resonating the above microwave, the resonator part has an open part formed to proceed an object to be processed into/out of the resonator part during the plasma discharge. The resonator part is transferred with the energy from a waveguide of a connected coaxial structure. A coupling hole is formed between the resonator part and the coaxial structure.

Abstract translation: 目的：提供一种使用开放式谐振器的微波等离子体放电系统，其通过克服常规谐振器的放大问题的表面处理的限制以及通过在线处理而能够有效且经济。 构成：根据微波等离子体放电系统，其特征在于，包括微波源（3）和产生微波的谐振器部（7），使用通过使所述微波共振而得到的能量进行等离子体放电，所述谐振器部形成有开放部 在等离子体放电期间进行要处理的物体进入/离开谐振器部分。 谐振器部分被来自连接的同轴结构的波导的能量传送。 在谐振器部件和同轴结构之间形成耦合孔。

公开(公告)号：KR1020020091430A

公开(公告)日：2002-12-06

申请号：KR1020010030103

申请日：2001-05-30

Applicant: 고등기술연구원연구조합

Inventor： 이근호 ,  최진주 ,  김윤기 ,  홍정미 ,  송호영

IPC: H05H1/46

Abstract: PURPOSE: A plasma discharge system using a circularly polarized cavity mode is provided which can generate a uniform large area microwave plasma by forming a circularly polarized wave. CONSTITUTION: The plasma discharge system includes a microwave source(1), and an output divider(5) dividing an output of the microwave source, and a phase shifter(6) shifting phases of each microwave to form a 90 deg. phase difference between microwaves divided by the output divider. And a resonator(9) is applied with each microwave having the above phase difference and performs a plasma discharge using an energy obtained from a circularly polarized microwave formed according as the above microwaves are synthesized. The phase shifter forms the above circularly polarized wave mode by giving a 90 deg. phase difference to two waves.

Abstract translation: 目的：提供一种使用圆偏振腔模式的等离子体放电系统，其通过形成圆偏振波产生均匀的大面积微波等离子体。 构成：等离子体放电系统包括微波源（1）和分隔微波源的输出的输出分压器（5）和移相器（6），使每个微波的相位相移以形成90度。 微波之间的相位差除以输出分频。 并且对具有上述相位差的每个微波施加谐振器（9），并且使用从根据上述微波形成的圆极化微波获得的能量进行等离子体放电。 移相器通过给出90度形成上述圆偏振波模式。 相位差为两波。