그래핀 박막의 전사 방법
    3.
    发明授权
    그래핀 박막의 전사 방법 有权
    传输薄膜薄膜的方法

    公开(公告)号:KR101428926B1

    公开(公告)日:2014-08-08

    申请号:KR1020130063268

    申请日:2013-06-03

    Inventor: 김규태 김웅연

    CPC classification number: H01L21/7806 H01L21/205 H01L21/324 H01L29/1606

    Abstract: A method of transferring a graphene thin layer comprises the steps of forming a graphene thin film on metal foil; forming a preliminary thermoplastic adhesive layer on the graphene thin film layer; enabling the graphene thin film to be in contact with the preliminary thermoplastic adhesive layer by melting the preliminary thermoplastic adhesive layer; forming a thermoplastic adhesive layer with the graphene thin film by hardening the preliminary thermoplastic adhesive layer; physically separating the graphene thin film and the thermoplastic adhesive layer from the metal foil; and transferring the graphene thin film on a substrate.

    Abstract translation: 转印石墨烯薄层的方法包括以下步骤:在金属箔上形成石墨烯薄膜; 在所述石墨烯薄膜层上形成初步的热塑性粘合剂层; 通过熔化预热的热塑性粘合剂层使石墨烯薄膜与预热的热塑性粘合剂层接触; 通过使预热塑性粘合剂层硬化来形成具有石墨烯薄膜的热塑性粘合剂层; 从金属箔物理分离石墨烯薄膜和热塑性粘合剂层; 并将石墨烯薄膜转移到基板上。

Patent Agency Ranking