Abstract:
본 발명은 플렉서블 전극 및 그 제조방법에 관한 것으로서, 보다 구체적으로는 우수한 유연성 및 생체적합성을 갖는 동시에, 기존의 전자부품들을 부착할 수 있도록 납땜성이 우수하여 유비쿼터스 헬스케어 모니터링과 같은 분야에 광범위하게 적용가능한 플렉서블 전극 및 그 제조방법에 관한 것이다.
Abstract:
PURPOSE: A platinum plating method for a polyimide electrode is provided to produce a polyimide electrode capable of accurately measuring bio-signals of micro current by reducing the impedance. CONSTITUTION: A platinum plating method for a polyimide electrode is as follows. A conductive seed layer is washed in sulfuric acid solution before electroplating(S3). The gases in contact with the conductive seed layer surface are eliminated through ultrasonic wave while carrying out electroplating with an electric current density of 2.0 Ma/cm^2 for 2 minutes(S4).
Abstract translation:目的:提供一种用于聚酰亚胺电极的铂电镀方法,以产生能够通过降低阻抗来精确测量微电流的生物信号的聚酰亚胺电极。 构成:聚酰亚胺电极的铂电镀方法如下。 导电种子层在电镀前在硫酸溶液中洗涤(S3)。 通过超声波消除与导电种子层表面接触的气体,同时以2.0Ma / cm 2的电流密度进行电镀2分钟(S4)。
Abstract:
PURPOSE: A method for separating a polyimide electrode from a substrate and a method for manufacturing the polyimide electrode including the same are provided to reduce manufacturing processes by removing a sacrificial layer forming process and a sacrificial layer removing process. CONSTITUTION: A polyimide electrode(1) is formed on a first substrate(2). The polyimide electrode is separated from the first substrate. A non-adhesive film, the polyimide electrode, the non-adhesive film and a second substrate(8) are successively arranged and full-baked. The polyimide electrode is formed by removing the non-adhesive film and the second substrate.
Abstract:
PURPOSE: A flexible electrode capable of a soldering and a manufacturing method thereof are provided to have excellent flexibility and biocompatibility and to improve the solderability for attaching existing electronic parts. CONSTITUTION: A first metal deposition layer is laminated on a porous polymer supporting layer. A polymer consisting of the porous polymer supporting layer is made of silicon rubber. A second metal deposition layer is laminated on the first metal deposition layer. A metal coating layer is laminated on the second metal deposition layer. Metal consisting of the metal coating layer is the metal selected from a group composed of nickel, gold, and silver and copper.
Abstract:
본 발명은 폴리이미드 전극의 백금 도금 방법에 관한 것으로, 폴리이미드층에 전극 패턴을 이루도록 형성된 전도성 시드층에 백금을 전기 도금하는 과정에서 황산 세척 및 초음파 세척을 통해 백금 도금층의 접착력을 증가시켜 생체 조직 내에서 장시간 사용되더라도 안정적으로 기능이 발휘되고 임피던스를 낮추어 미세 전류의 생체 신호를 측정할 수 있으며 이에 따라 생체 신호 측정을 정확하고 용이하게 수행할 수 있는 폴리이미드 전극을 제조할 수 있는 폴리이미드 전극의 백금 도금 방법을 제공한다. 폴리이미드, 백금 도금, 전도성 시드층, 접착력
Abstract:
PURPOSE: A flexible electrodes for human body communication is provided to offer electrodes which rigidly adhere to a human body part. CONSTITUTION: A polyimide electrode is formed on a substrate. The polyimide electrode is separated from a substrate. A non-bonding film, the separated polyimide electrode, another non-bonding film, and the substrate are arranged by turns. After performing a full baking, the non-bonding film and the substrate are removed. A polydimethylsiloxane layer is combined to the upper and the lower part of the polyimide electrodes.
Abstract:
PURPOSE: A method for fixing a PDMS(polydimethylsiloxane) electrode for MEMS(micro-electromechanical systems) with polyimide and an electrode manufactured by the same are provided to ensure high transmittance of moisture or air by employing a PDMS base and prevent the separation of an electrode from the PDMS base. CONSTITUTION: A method for fixing a PDMS electrode for MEMS with polyimide is as follows. A proper amount of polyimide is injected on a silicon wafer(4). A polyimide layer(5) is formed by carrying out spin coating. A pattern film(6) patterned with a width greater than the shape of an electrode is laminated. A light is irradiated so that the polyimide layer is left to the width greater than the shape of an electrode. A titanium layer(7) is deposited in order to form an electrode(31) on the wafer in which the polyimide layer is formed. A gold layer(8) is coated on the titanium layer with a vacuum thin film deposition method.