公开(公告)号：KR1020120004578A

公开(公告)日：2012-01-13

申请号：KR1020100065137

申请日：2010-07-07

Applicant: 광주과학기술원

Inventor： 강진호 ,  이선규 ,  주재영 ,  이차범 ,  우도균

IPC: G01B9/02 ,  G01B11/24 ,  G01B11/00 ,  B82B1/00

CPC classification number: G01B11/2441 ,  G01B9/02049 ,  G01B11/026 ,  G01J9/02 ,  G01J2009/0292 ,  G01N21/45

Abstract: PURPOSE: An apparatus for measuring nanometric displacement and surface profile using a fiber-optic fizeau interferometer is provided to remarkably reduce time required for aligning optical axes because an optical element is not required. CONSTITUTION: An apparatus for measuring nanometric displacement and surface profile using a fiber-optic fizeau interferometer comprises a light source(10), a light source driver(70), a photo coupler(40), a lensed fiber(90), first and second photoelectric conversion units, and a computing unit(80). The light source emits light. The light source driver drives the light source. The photo coupler branches the light from the light source into two light routes and sends one and the other light routes to the first and second photoelectric conversion units, respectively. The lens fiber sends the light reflected from an object to the photo coupler. The first and second photoelectric conversion units convert the light from the photo coupler into an electric signal. The computing unit computes the nano displacement of the object by analyzing the electric signal.

Abstract translation: 目的：提供一种用于使用光纤fizeau干涉仪测量纳米位移和表面轮廓的设备，以显着减少对准光轴所需的时间，因为不需要光学元件。 构成：使用光纤fizeau干涉仪测量纳米位移和表面轮廓的装置包括光源（10），光源驱动器（70），光耦合器（40），透镜光纤（90），第一和 第二光电转换单元和计算单元（80）。 光源发光。 光源驱动器驱动光源。 光耦合器将来自光源的光分成两条光路，并将一条光路分别发送到第一和第二光电转换单元。 透镜光纤将从物体反射的光线发送到光电耦合器。 第一和第二光电转换单元将来自光耦合器的光转换成电信号。 计算单元通过分析电信号来计算物体的纳米位移。