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公开(公告)号:KR101973855B1
公开(公告)日:2019-08-23
申请号:KR1020170070741
申请日:2017-06-07
Applicant: 광주과학기술원
Inventor: 박성주 , 임용철 , 한장환
IPC: H01L27/15 , H01L33/12 , H01L33/36 , H01L33/14