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公开(公告)号：KR101234222B1
公开(公告)日：2013-02-18
申请号：KR1020100059922
申请日：2010-06-24
Applicant: 국민대학교산학협력단
Abstract: 기판, 기판 상에 있으며 기공을 갖는 패턴층 및 기공이 좁혀지도록 기공의 표면에 증착된 증착층을 포함하며, 기공은 기판 반대쪽의 패턴층의 표면 상으로 노출된 개구부를 갖는 나노 템플릿 및 그 제조 방법이 공개된다.
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公开(公告)号：KR1020110139851A
公开(公告)日：2011-12-30
申请号：KR1020100059922
申请日：2010-06-24
Applicant: 국민대학교산학협력단
CPC classification number: C25D11/045 , B82B3/00
Abstract: PURPOSE: A nano template and a manufacturing method thereof are provided to produce a nano template with pores having a controlled aspect ratio by efficiently controlling the size of the pores. CONSTITUTION: A nano template comprises a substrate(30), a pattern layer(10), a deposition layer(20), and a protective layer. The pattern layer is formed on the substrate from oxide of metal selected from the group consisting of Al, Ti, Ta, Zr, Nb, and W and has pores(50) including an opening exposed on the surface of the pattern layer. The deposition layer is laminated on the surface of the pores in order to reduce the pores exposing the surface of the substrate. The protective layer includes polystyrene, paraffin wax, or nail polish and fills in the pores by covering the pattern layer on the opposite side of the substrate.
Abstract translation: 目的：提供纳米模板及其制造方法，以通过有效地控制孔的尺寸来制备具有受控纵横比的孔的纳米模板。 构成：纳米模板包括基底（30），图案层（10），沉积层（20）和保护层。 图案层由选自Al，Ti，Ta，Zr，Nb和W的金属的氧化物形成在基板上，并且具有在图案层的表面上露出的开口的孔（50）。 沉积层层压在孔的表面上，以便减少暴露于基底表面的孔。 保护层包括聚苯乙烯，石蜡或指甲油，并通过覆盖基材相对侧上的图案层而填充在孔中。
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