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公开(公告)号:KR1020100118795A
公开(公告)日:2010-11-08
申请号:KR1020090037677
申请日:2009-04-29
Applicant: 국민대학교산학협력단
IPC: H01L21/027
CPC classification number: G03F7/0002 , B29C59/022 , G03F7/0005 , H01L21/6734
Abstract: PURPOSE: An apparatus for uniformly pressing an extremely large area is provided to prevent the generation of voids between a substrate stand and an elastic mold by reducing a pressure between the substrate stand and the elastic mold. CONSTITUTION: A chuck module(110) includes a substrate stand(111) in order to support and fix a substrate(10). An elastic mold(120) is arranged on the upper side of the chuck module and is spaced apart from the substrate. A body module(130) fixes the elastic mold. A pressurizing chamber(140) is arranged on the upper side of the elastic mold. A pump injects air in the pressurizing chamber.
Abstract translation: 目的:提供一种用于均匀地挤压极大面积的装置,以通过减小基板支架和弹性模具之间的压力来防止在基板支架和弹性模具之间产生空隙。 构成:卡盘模块(110)包括用于支撑和固定基板(10)的基板支架(111)。 弹性模具(120)布置在卡盘模块的上侧并与衬底间隔开。 身体模块(130)固定弹性模具。 加压室(140)布置在弹性模具的上侧。 泵将空气注入加压室。
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公开(公告)号:KR101765816B1
公开(公告)日:2017-08-11
申请号:KR1020110039554
申请日:2011-04-27
Applicant: 한국과학기술원 , 국민대학교산학협력단 , 서울대학교산학협력단 , 박재영
CPC classification number: Y02E10/542 , Y02P70/521
Abstract: 본발명은저온에서효과적으로 TiO의소결을이루어광전극및 염료감응태양전지를제조하는방법을제공하는것이다. 본발명에서는기존의 500C에서 1시간동안열처리되어플렉시블기판과같은저온공정이요구될때의처리한계를저온의대기압플라즈마를통해해결함으로써새로운염료감응태양전지의공정기술을제안한다. 특히대기압플라즈마를통한저온소결공정은기존의방법에비해얇은박막의태양전지개발은물론, 공정시간도단축할수 있어경제가치가매우높다.
Abstract translation: 本发明是提供高效地制造光学电极的方法,以及在低温下由TiO烧结的染料敏化太阳能电池。 在本发明中,加热处理在常规500C1小时提出了一种工艺技术在通过的过程中新的染料敏化太阳能电池时的低温工艺的限制,例如柔性基板需要通过低温常压等离子体处理。 特别是,通过大气压等离子体低温烧结过程是薄膜相比于常规方法的太阳能电池,当然,也可以缩短处理时间,这是经济价值是非常高的。
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公开(公告)号:KR1020120121940A
公开(公告)日:2012-11-07
申请号:KR1020110039554
申请日:2011-04-27
Applicant: 한국과학기술원 , 국민대학교산학협력단 , 서울대학교산학협력단 , 박재영
CPC classification number: Y02E10/542 , Y02P70/521 , H01L31/04 , H01L21/02186 , H01L31/18 , H01L51/4226 , H01L2924/05341 , Y02E10/50 , Y02E10/54
Abstract: PURPOSE: A method for manufacturing a photo electrode and a dye-sensitized solar cell using low temperature atmospheric pressure plasma is provided to maximize conversion efficiency by reducing resistance using a TCO(Transparent Conductive Oxides) substrate. CONSTITUTION: A TiO2(Titanium Oxide) paste is coated on a substrate. A TiO2 thin film is formed on the TiO2 paste. Atmospheric pressure plasma is processed on the TiO2 thin film. The atmospheric pressure plasma is formed below 200 degrees. A thickness of the TiO2 thin film is controlled by repeating a cycle including a step of forming the TiO2 thin film and a step of processing the atmospheric pressure plasma over two times.
Abstract translation: 目的:提供使用低温大气压等离子体制造光电极和染料敏化太阳能电池的方法,以通过使用TCO(透明导电氧化物)基板降低电阻来最大化转换效率。 构成:将TiO 2(氧化钛)糊剂涂覆在基材上。 在TiO2浆料上形成TiO2薄膜。 在TiO2薄膜上处理大气压等离子体。 大气压等离子体形成在200度以下。 通过重复包括形成TiO 2薄膜的步骤和将大气压等离子体处理两次的步骤的循环来控制TiO 2薄膜的厚度。
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