公开(公告)号：KR1020120076852A

公开(公告)日：2012-07-10

申请号：KR1020100138586

申请日：2010-12-30

Applicant: 국방과학연구소

Inventor： 이우영 ,  김연주 ,  최향희 ,  최선경 ,  윤희주

IPC: G01N27/72 ,  B82Y15/00

Abstract: PURPOSE: An organophosphorus compound gas sensor and a manufacturing method thereof, and a chemical gas sensor using the same and method using the sensor are provided to improve resettability by reducing a time required for attaching/detaching gas molecule in a room temperature. CONSTITUTION: An organophosphorus compound gas sensor comprises source-drain electrodes(131,132), a substrate(134), and a detecting layer(133). Power is applied to the source-drain electrodes. The source-drain electrodes are formed on the substrate. The detecting layer contains a single carbon nano tube between the source-drain electrodes on the substrate. The source-drain electrodes are formed with palladium metal. Electrode patterns are formed by using a photolithographic method and a liftoff method together.

Abstract translation: 目的：提供一种有机磷化合物气体传感器及其制造方法以及使用该传感器的化学气体传感器和使用该传感器的方法，以通过减少在室温下分离气体分子所需的时间来提高重新定位性。 构成：有机磷化合物气体传感器包括源 - 漏电极（131,132），衬底（134）和检测层（133）。 电源施加到源 - 漏电极。 源 - 漏电极形成在衬底上。 检测层在基板上的源 - 漏电极之间包含单个碳纳米管。 源极 - 漏极用钯金属形成。 电极图案通过使用光刻法和脱模法一起形成。