公开(公告)号：KR101448831B1

公开(公告)日：2014-10-16

申请号：KR1020130041495

申请日：2013-04-16

Applicant: 국방과학연구소

Inventor： 김승우 ,  진종한 ,  이주형 ,  김영진 ,  김윤석 ,  이근우 ,  한성흠 ,  장윤수 ,  장희숙

IPC: G01B9/02 ,  G01B11/14

Abstract: The present invention relates to a femtosecond laser based distance measurement device. More specifically, the present invention relates to a distance measurement device which uses a femtosecond laser based phase-locked composite wave interferometer to maintain constant phases between composite waves and enable distance measurement by measuring repetition rate of femtosecond laser in order to achieve high resolving power equal to or less than 1 μm and remove nonlinear error due to phase. According to the present invention, no limitation exists in a distance to be measured, high resolving power equal to or less than 1 μm is realized by a locked phase, and periodic nonlinear error is not caused.

Abstract translation: 本发明涉及一种基于飞秒激光的距离测量装置。 更具体地说，本发明涉及一种距离测量装置，其使用基于飞秒激光的相位锁合复合波干涉仪来保持复合波之间的恒定相位，并且通过测量飞秒激光器的重复率来实现距离测量，以便实现高分辨率的功率 或者小于1μm，并且消除由于相位引起的非线性误差。 根据本发明，在待测距离上不存在限制，通过锁定相实现等于或小于1μm的高分辨能力，并且不会引起周期性非线性误差。