公开(公告)号：KR100347725B1

公开(公告)日：2002-08-09

申请号：KR1020000054684

申请日：2000-09-18

Applicant: 대한민국(충남대학교)

Inventor： 김도진 ,  최규석

IPC: C23C14/26

Abstract: 도가니의 상부에 원료 물질이 뭉치는 현상을 제거하고 균일한 가열이 가능하도록, 박막증착용 고체 원료가 장입되는 도가니와, 도가니에 밀착되어 설치되고 판형상으로 이루어지며 상부의 단면적은 작고 하부의 단면적은 크게 형성하는 히터와, 히터를 지지하며 하부로의 열방출을 차단하는 지지체와, 도가니 및 히터의 외부를 감싸며 외부로의 열방출을 차단하는 열차폐판을 포함하는 저항가열식 박막 증착장치를 제공한다.

公开(公告)号：KR1020020021937A

公开(公告)日：2002-03-23

申请号：KR1020000054684

申请日：2000-09-18

Applicant: 대한민국(충남대학교)

Inventor： 김도진 ,  최규석

IPC: C23C14/26

CPC classification number: C23C14/26

Abstract: PURPOSE: A resistance heating type effusion cell using a plate shaped heater of which upper and lower parts have different areas is provided to remove aggregation of raw materials at the upper part of a crucible and uniformly heat the raw materials. CONSTITUTION: The resistance heating type effusion cell comprises a crucible(2) into which a solid raw material for thin film deposition is charged; a heater(10) which is closely adhered to the crucible and formed in a plate shape, and which has a small area of the upper part and a large area of the lower part; a support(4) which supports the heater and cuts off heat radiation into the lower part; a heat shielding plate(6) which envelops the outer part of the crucible and heater, and cuts off heat radiation into the outside, wherein the heater is made of a tungsten or tantalum thin plate, and the heater is formed in a serpentine shape so that the heater is repeatedly bended in zigzag along a length direction of the crucible.

Abstract translation: 目的：提供使用上下部具有不同面积的板状加热器的电阻加热型渗出电池，以去除坩埚上部的原料聚集并均匀加热原料。 构成：电阻加热型渗出槽包括：坩埚（2），其中填充有用于薄膜沉积的固体原料; 与坩埚紧贴并形成为板状的加热器（10），上部的面积较小，下部的面积较大; 支撑加热器并将热辐射切断到下部的支撑件（4） 封闭坩埚和加热器的外部的隔热板（6），并将热辐射切断到外部，其中加热器由钨或钽薄板制成，加热器形成为蛇形， 加热器沿着坩埚的长度方向以锯齿形重复弯曲。