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公开(公告)号:KR102107899B1
公开(公告)日:2020-05-07
申请号:KR1020180067830
申请日:2018-06-14
Applicant: 도쿄엘렉트론가부시키가이샤
Inventor: 마에하라히로키 , 와타나베나오키 , 나카무라간토
IPC: H01L43/12 , H01L43/02 , H01L43/10 , H01L43/08