公开(公告)号：KR101146996B1

公开(公告)日：2012-05-23

申请号：KR1020100066991

申请日：2010-07-12

Applicant: 삼성모바일디스플레이주식회사

Inventor： 김상열 ,  박일석 ,  한결 ,  김무현

IPC: H01L51/56

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/56 ,  H01L21/67173 ,  H01L51/001 ,  H01L51/0011 ,  H01L2227/323

Abstract: A method of manufacturing an organic light-emitting display device, which simplifies fabrication processes of the organic light-emitting display device and improves manufacturing yield. This method includes preparing a substrate that has a number of first regions and a second region surrounding the first regions. The substrate is conveyed into a chamber. An organic emission layer is formed in a direction on a surface of the substrate. A first metal layer is formed on the organic emission layer so as to correspond to the first regions, and the organic emission layer formed on the second region is removed.

公开(公告)号：KR1020120006322A

公开(公告)日：2012-01-18

申请号：KR1020100066991

申请日：2010-07-12

Applicant: 삼성모바일디스플레이주식회사

Inventor： 김상열 ,  박일석 ,  한결 ,  김무현

IPC: H01L51/56

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/56 ,  H01L21/67173 ,  H01L51/001 ,  H01L51/0011 ,  H01L2227/323

Abstract: PURPOSE: A manufacturing method of an organic light emitting display apparatus is provided to eliminate an organic light emitting film while performing an inline process, thereby improving a manufacturing yield. CONSTITUTION: A loading part(710) comprises a first rack(712), an introducing robot(714), an introduction chamber(716), and a first inversion chamber(718). A deposition part(730) comprises a first chamber(731) and a second chamber which are mutually associated. First and second thin film deposition assemblies(100,200) are arranged in the first chamber. Third and fourth thin film deposition assemblies(300,400) are arranged in the second chamber. An electrostatic chuck(600) is sequentially transferred to the loading part, the deposition part, and an unloading part(720).

Abstract translation: 目的：提供一种有机发光显示装置的制造方法，用于在进行在线处理的同时消除有机发光膜，从而提高制造成品率。 构成：装载部（710）包括第一齿条（712），引入机器人（714），导入室（716）和第一反转室（718）。 沉积部分（730）包括相互关联的第一室（731）和第二室。 第一和第二薄膜沉积组件（100,200）布置在第一腔室中。 第三和第四薄膜沉积组件（300,400）布置在第二腔室中。 静电吸盘（600）依次传送到装载部分，沉积部分和卸载部分（720）。