公开(公告)号：KR1020140089846A

公开(公告)日：2014-07-16

申请号：KR1020130001774

申请日：2013-01-07

Applicant: 삼성전기주식회사

Inventor： 김동선 ,  강희구 ,  서원호 ,  김선규 ,  김준한

IPC: G01B11/24 ,  H01L21/66

Abstract: Provided in the present invention is an apparatus for measuring the height of a bump on a substrate, which comprises: a laser beam radiation unit which radiates laser beams to the surface of a substrate and the top of a bump formed on the substrate; and a laser beam input unit which is inputted with the laser beams reflected by the surface of the substrate and the top of the bump, in order to measure the height of the bump according to an optical triangulation method. The laser beam radiation unit and the laser beam input unit can rotate on the bump. In addition, provided in the present invention is a method for measuring the height of a bump on a substrate, which comprises as follows: a laser beam radiation step where the surface of a substrate and the top of a bump formed on the substrate are radiated with laser beams from the laser beam radiation unit; and a height measurement step where the laser beams reflected by the surface of the substrate and the top of the bump formed on the substrate pass a light collecting lens and are inputted into the laser beam input unit, in order to measure the height of the bump on the substrate according to the optical triangulation method. The laser beam radiation unit and the laser beam input unit can rotate on the bump on the substrate.

Abstract translation: 本发明提供了一种用于测量衬底上的凸块的高度的装置，其包括：激光束辐射单元，其将激光束辐射到衬底的表面和形成在衬底上的凸块的顶部; 以及激光束输入单元，其输入由基板的表面和凸块的顶部反射的激光束，以便根据光学三角测量方法测量凸块的高度。 激光束辐射单元和激光束输入单元可以在凸块上旋转。 此外，在本发明中提供了一种用于测量衬底上的凸块的高度的方法，其包括如下：激光束辐射步骤，其中衬底的表面和形成在衬底上的凸块的顶部被辐射 来自激光束辐射单元的激光束; 以及高度测量步骤，其中由衬底的表面反射的激光束和形成在衬底上的凸起的顶部通过光收集透镜并被输入到激光束输入单元中，以便测量凸块的高度 根据光学三角测量法在基板上。 激光束辐射单元和激光束输入单元可以在基板上的凸块上旋转。