公开(公告)号：KR1020100055230A

公开(公告)日：2010-05-26

申请号：KR1020080114197

申请日：2008-11-17

Applicant: 삼성전기주식회사

Inventor： 부림,엘모스타파 ,  송종형 ,  양정승 ,  양주환 ,  김희연

IPC: H03H3/02

CPC classification number: H03H3/02 ,  C03B35/00 ,  H01L41/187 ,  H01L41/22

Abstract: PURPOSE: A piezoelectric body and a manufacturing method thereof, a cantilever using the same and a manufacturing method thereof are provided to improve hysteresis property and creep property by doping lanthanum and niobium. CONSTITUTION: A piezoelectric driving body is formed into a flat plate shape(S100). The piezoelectric driving body fixes one-side end on a substrate(S200). The piezoelectric driving body separates other side of an end part on the substrate. The voltage is sanctioned in both sides of a piezoelectric layer. The piezoelectric layer drives the end part separated in substrate to up and down. A sacrifice layer locates between the one-side end of the piezoelectric driving body and the substrate. The sacrifice layer provides separated space to the piezoelectric driving body.

Abstract translation: 目的：提供一种压电体及其制造方法，使用其的悬臂及其制造方法，以通过掺杂镧和铌来改善滞后特性和蠕变性能。 构成：将压电驱动体形成为平板状（S100）。 压电驱动体将一侧端部固定在基板上（S200）。 压电驱动体分离基板上端部的另一侧。 电压在压电层的两侧受到制裁。 压电层驱动基板上分离的端部上下。 牺牲层位于压电驱动体的一侧端部和基板之间。 牺牲层向压电驱动体提供分离的空间。

公开(公告)号：KR1020090025837A

公开(公告)日：2009-03-11

申请号：KR1020070090975

申请日：2007-09-07

Applicant: 삼성전기주식회사

Inventor： 우기석 ,  송종형 ,  김희연

IPC: G02B26/00

CPC classification number: G02B26/0858 ,  G02B7/008 ,  Y10S359/904

Abstract: A MEMS structure having a temperature correction layer and an optical modulator using the same are provided to enhance accuracy and reliability of a device operation by resolving a thermal deformation problem in a MEMS(Micro Electro Mechanical System) structure. An insulating layer(120) is positioned on a substrate(110), and is used as an etch stop layer. A bottom mirror is formed on the insulating layer, reflects/diffracts an incident light, and is made of various light reflective materials. A sacrificial layer(130) is positioned on the insulating layer. Both sides of the sacrificial layer support a ribbon layer(140) by etching a part of the sacrificial layer. A center part of the ribbon layer is separated in order to secure a driving space. The ribbon layer is made of silicone nitride based material. A piezoelectric driving body(150) is positioned on both sides of the ribbon layer. The piezoelectric driving body includes a bottom electrode(151), a piezoelectric layer(152), and a top electrode(153). A temperature correction layer(154) is formed on a top surface and a bottom surface of the piezoelectric driving body.

Abstract translation: 提供具有温度校正层的MEMS结构和使用其的光学调制器，以通过解决MEMS（微机电系统）结构中的热变形问题来提高器件操作的精度和可靠性。 绝缘层（120）位于衬底（110）上，并用作蚀刻停止层。 底部反射镜形成在绝缘层上，反射/衍射入射光，并由各种光反射材料制成。 牺牲层（130）位于绝缘层上。 牺牲层的两侧通过蚀刻牺牲层的一部分来支撑带层（140）。 色带层的中心部分被分离以确保驱动空间。 带层由氮化硅基材料制成。 压电驱动体（150）位于带状层的两侧。 压电驱动体包括底部电极（151），压电层（152）和顶部电极（153）。 在压电驱动体的顶表面和底表面上形成温度校正层154。