접합 항복을 이용한 전기적 퓨즈 및 이를 구비하는 반도체 집적회로
    1.
    发明公开
    접합 항복을 이용한 전기적 퓨즈 및 이를 구비하는 반도체 집적회로 无效
    使用断路和半导体集成电路的电气保险丝

    公开(公告)号:KR1020120050338A

    公开(公告)日:2012-05-18

    申请号:KR1020100111780

    申请日:2010-11-10

    CPC classification number: H01L23/62 H01L29/861 H01L2924/0002 H01L2924/00

    Abstract: PURPOSE: An electrical fuse using junction breakdown and a semiconductor integrated circuit including the same are provided to improve compatibility according to a changed process by using a junction structure which is not influenced by a process. CONSTITUTION: A second active region(120) is doped to a second impurity type. A first silicide film(141) is formed on a part of an upper end portion of a first active region(110). A second silicide film(142) is formed on a part of an upper end portion of the second active region. The second silicide film is formed to be separated from the first silicide film. First and second contacts(151,152) are respectively formed on the upper end of the first and the second silicide films.

    Abstract translation: 目的:提供使用结击穿的电熔丝和包括其的半导体集成电路,以通过使用不受过程影响的结结构来改变根据改变的工艺的兼容性。 构成:将第二有源区(120)掺杂到第二杂质类型。 第一硅化物膜(141)形成在第一有源区(110)的上端部的一部分上。 第二硅化物膜(142)形成在第二有源区的上端部的一部分上。 第二硅化物膜形成为与第一硅化物膜分离。 第一和第二触点(151,152)分别形成在第一和第二硅化物膜的上端。

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