公开(公告)号：KR1020080069051A

公开(公告)日：2008-07-25

申请号：KR1020070006646

申请日：2007-01-22

Applicant: 삼성전자주식회사

Inventor： 남창진

IPC: H01L21/68

CPC classification number: H01L21/67766 ,  H01L21/67772

Abstract: A substrate transfer device is provided to prevent a substrate in a FOUP(Front Opening Unified Pod) from being separated from a slot and misplaced. A substrate transfer device comprises a load port(240) and a housing. The load port, on which a container is placed, has a holding member(244), a vertical frame(242), and a supporting member(246). The holding member holds up the container. The vertical frame, assembled to a side part of the holding member and inserted to an opening unit which is formed at a front surface of the housing, has a through hole facing to a door of the container. The supporting member, installed at the vertical frame, supports an outer surface of the container to minimize movement of the container. The housing is located between the load port and a process facility, and has a robot transferring the substrate.

Abstract translation: 提供基板传送装置以防止FOUP（前开口统一荚）中的基板与槽分离并放错位置。 衬底传送装置包括负载端口（240）和壳体。 容器放置在其上的装载口具有保持构件（244），垂直框架（242）和支撑构件（246）。 握持构件容纳容器。 组装到保持构件的侧部并插入到形成在壳体的前表面处的开口单元的垂直框架具有面向容器的门的通孔。 安装在垂直框架上的支撑构件支撑容器的外表面以最小化容器的移动。 壳体位于负载端口和处理设备之间，并且具有机器人传送衬底。

公开(公告)号：KR1020060134670A

公开(公告)日：2006-12-28

申请号：KR1020050054556

申请日：2005-06-23

Applicant: 삼성전자주식회사

Inventor： 남창진 ,  임규홍 ,  안병설 ,  윤여국

IPC: H01L21/02

Abstract: An apparatus for automatically opening/closing a keyboard attached to a semiconductor fabricating equipment and a method for controlling the same are provided to open or close a keyboard cover and a keyboard assembly by accurately determining when use of the keyboard is completed. An open/close switch(112) is driven in accordance with use of a keyboard. A cylinder(120) is fixed to a keyboard cover. A drive unit(118) moves the cylinder linearly. A cylinder connecting device is connected to the cylinder to convert a linear motion of the cylinder into a rotary motion and then transmit it to a keyboard assembly(102). A controller(104) controls the drive unit when the open/close switch is turned on.

Abstract translation: 提供一种用于自动打开/关闭附接到半导体制造设备的键盘的装置及其控制方法，以通过精确地确定键盘的使用何时完成来打开或关闭键盘盖和键盘组件。 根据使用键盘驱动开/关开关（112）。 气缸（120）固定在键盘盖上。 驱动单元（118）线性移动气缸。 气缸连接装置连接到气缸以将气缸的直线运动转换成旋转运动，然后将其传送到键盘组件（102）。 当打开/关闭开关打开时，控制器（104）控制驱动单元。